Digitale Medien
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
57 (1990), S. 686-688
ISSN:
1077-3118
Quelle:
AIP Digital Archive
Thema:
Physik
Notizen:
Columnar grains of PtSi surrounded by high quality epitaxial silicon are obtained by ultrahigh vacuum codeposition of Si and Pt in an 8:1 ratio on Si(111) substrates heated to 610–810 °C. The areal density of columns varies from 120 to 3.8 μm−2, and layers with thicknesses from 100 nm to 1 μm have been demonstrated. This result is similar to that found previously for CoSi2 (a nearly lattice-matched cubic-fluorite crystal) on Si(111), in spite of the orthorhombic structure of PtSi. The PtSi grains are also epitaxial and have one of three variants of the relation defined by PtSi(010)//Si(111), with PtSi[001]//Si〈110〉.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.103592
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