Digitale Medien
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
70 (1999), S. 2225-2229
ISSN:
1089-7623
Quelle:
AIP Digital Archive
Thema:
Physik
,
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
A novel technique is described for the noncontact determination of the spacings of solid and air-gap étalons of low reflectivity by the retroreflection of a He–Ne laser beam. Gaps as small as 50 μm were measured with a precision of better than ±1 μm. Typical measurement accuracy is better than 2%. © 1999 American Institute of Physics.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.1149741
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