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Digitale Medien

Long lifetime operation of an ArF-excimer laser (1996)

Saito, T. ; Ito, S. ; Tada, A.

Springer

Applied physics 63 (1996), S. 229-235

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Details

ISSN: 1432-0649

Schlagwort(e): PACS: 42.55

Quelle: Springer Online Journal Archives 1860-2000

Thema: Physik

Notizen: Abstract. An experimental investigation to improve the lifetime of a discharge-excited ArF-excimer laser is presented. The three dominant factors restricting its lifetime are CF4 generation in the laser gas, color-center formation in the optics and input power density reduction due to electrode ablation. Copper electrodes were superior to nickel electrodes in regard to electrode ablation. A gas lifetime of more than 109 shots (about one month at 400 Hz) is shown for an ArF-excimer laser with a liquid-nitrogen trap and high-temperature zirconium alloy trap.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1007/BF01833791

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