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  • 1
    Digitale Medien
    Digitale Medien
    The study of a 2.45 GHz plasma source as a plasma generator for the SCECR electron cyclotron resonance ion source : Proceedings of 5th international conference on ion sources (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1135-1137 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: The 2.45 GHz plasma source is a multicusp electron cyclotron resonance source with a tuned single mode microwave cavity. This is a bright plasma source with a well characterized operating mode and plasma parameters [A. K. Srivastava, et al., Rev. Sci. Instrum. 63, 2556 (1992); A. K. Srivastava and J. Asmussen, J. Vac. Sci. Technol. A 11, 1307 (1993)]. The superconducting electron cyclotron resonance (SCECR) is a fully superconducting, hexapole stabilized tandem mirror ion source with a multimode microwave cavity. It is a high charge state ion source with extensive beam diagnostics [T. A. Antaya, Nucl. Instrum. Methods B 40/41, 1024 (1989)]. The coupling of these two sources permits a number of fundamental studies important to both classes of ion sources. The 2.4 GHz plasma source will be used to study the effects of ion or electron (or both) density enhancement on the charge state distribution, total extracted current, and ion energy distributions of the SCECR. The SCECR in turn will be used as a test stand to measure directly the ion distribution and beam characteristics of the 2.45 GHz plasma source. The first results with this hybrid ion source will be presented at this conference.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1145038
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  • 2
    Digitale Medien
    Digitale Medien
    Measurement of band offset of a strained-layer single quantum well by a capacitance-voltage technique (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 74 (1993), S. 7618-7620 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: We report on a modified Kroemer's analysis [Appl. Phys. Lett. 36, 295 (1980)] for the determination of the band offset ΔEc of a single quantum well from a carrier profile obtained by capacitance-voltage measurement. The procedure is applied to a pseudomorphic GaAs/InGaAs/GaAs strained layer structure.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.354941
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  • 3
    Digitale Medien
    Digitale Medien
    Thermal degradation of InP in open tube processing: deep-level photoluminescence (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 68 (1990), S. 2324-2330 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Thermal processing of InP at temperatures above 500 °C is indispensable in the growth and device fabrication of InGaAsP alloy semiconductors for optoelectronic and microwave applications. Incongruous loss of P at these temperatures creates native defects and their complexes. The presence of such defects modifies the electrical and optical properties of the material resulting in poor device performance. In addition, native defects play a significant role in dopant diffusion which is a topic of current interest. We have measured deep-level photoluminescence (PL) on undoped InP after heat treatments at 500 and 550 °C in an open-tube processing system in different protective environments of powder InP, and Sn-InP melt together with an InP cover. In this paper we shall present the PL results which have bearing on the question of defects. We find that (1) the Sn-InP melt provides better protection in preserving the overall luminescence in InP; (2) the deep-level PL related to defects has at least two components in the virgin samples, viz., MnIn, and band C, which is a native defect complex related to VP; (3) a new defect appears in samples heated in a P-deficient environment; and (4) the enhancement in the deep-level luminescence intensity after heat treatment can be attributed to the excess defect concentrations existing under nonequilibrium conditions of an open-tube processing environment.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.346539
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  • 4
    Digitale Medien
    Digitale Medien
    Synthesis and luminescence properties of barium niobium oxide fluoride (BaNbOF5) with isolated [NbOF5]2- octahedra (1992)
    s.l. : American Chemical Society
    Chemistry of materials 4 (1992), S. 1011-1013 
    Details
    ISSN: 1520-5002
    Quelle: ACS Legacy Archives
    Thema: Chemie und Pharmazie , Maschinenbau
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1021/cm00023a016
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  • 5
    Digitale Medien
    Digitale Medien
    Experimental characterization of a compact ECR ion source : Proceeding of the fourth International Conference on ion sources (1992)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 2556-2558 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: A small ECR plasma source is experimentally evaluated. The compact, coaxial cavity source has an outer diameter of about 5.8 cm and is less than 15 cm in length, and can therefore be fitted on vacuum ports on existing MBE machines. Double- and single-Langmuir probes and an energy analyzer are used to measure ion density, electron temperature, plasma potential, and energy distributions at various downstream and cross-sectional positions in the plasma beam. The measurements are made for a variety of flow rates (2–30 sccm) and the corresponding pressures (from about 10−5 to 10−4 Torr), incident powers ranging from 80 to 164 W, and various gas types including argon and oxygen. The experimental measurements show that the ion source provides ion density of about 1011/cm3 at relatively low powers of 123 W and at sub-mTorr pressures. The ions created follow typical ambipolar diffusion out of the discharge creation region. Ions impinging downstream on a grounded substrate in an argon discharge show a narrow, peaked energy distribution that varies with pressure and power. Low-energy ion beams with energies less than 35 eV can easily be produced by varying the pressure and input power.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1142887
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  • 6
    Digitale Medien
    Digitale Medien
    Reduction in linewidth enhancement factor for In0.2Ga0.8As/ GaAs/Al0.5Ga0.5As strained quantum well lasers (1991)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 58 (1991), S. 2198-2199 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The linewidth enhancement factor α as low as 0.54 in In0.2Ga0.8As/GaAs/AlGaAs strained single quantum well lasers emitting at 0.97 μm has been measured from spontaneous emission spectra below threshold. On reducing the current further, α goes down to 0.34. These low values of α have been attributed to strain in the In0.2Ga0.8As active layer.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.104925
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  • 7
    Digitale Medien
    Digitale Medien
    Discharge characteristics of a 5 cm multipolar electron cyclotron resonance ion sourcea) (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1749-1752 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: A compact 5-cm-diam multipolar electron cyclotron resonance (ECR) ion source is characterized. The source is experimentally studied with no grids using argon gas with 50–250 W of 2.45-GHz microwave input power. Using a microcoaxial probe it was confirmed that the exciting electromagnetic fields within the resonant cavity were indeed TE111, as expected from the critical cavity dimensions. Double Langmuir probe measurements indicate high densities of about (4–5)×1011/cm3 near the source, and 5 cm downstream from the source output the densities become very uniform with a value of about 5×1010/cm3 over a 10-cm diameter. Electron energy distribution functions (EEDF) were measured using a single Langmuir probe. Average electron energies were seen to be about 8–10 eV with an energy distribution function falling between a Maxwellian and a Druyvesteyn distribution. Ion energy distribution functions (IEDF) were measured with a multigrid energy analyzer. It was seen that the distribution functions were narrow and peaked [with a full width half maximum (FWHM) of about 5 eV] except under certain conditions. Above 200-W input power, and also below about 0.5 mTorr there is significant broadening of the ion distribution function. It is speculated that the former may be caused by gas heating, and the latter may be caused by the presence of Ar+2 ions. With its high current densities ((approximately-greater-than)10 mA/cm2) and low average ion energies (〈40 eV), it is expected that this ion/plasma source will be very useful in many etching and deposition applications.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1144871
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  • 8
    Digitale Medien
    Digitale Medien
    Modeling the electromagnetic excitation of a compact ECR ion/free radical sourcea) (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1761-1765 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: The electromagnetic excitation of a discharge inside a microwave plasma source has been numerically modeled in the time domain. The source is a cylindrical, single-mode microwave-excited cavity. The time-varying electromagnetic fields inside the resonant cavity, both inside and outside the discharge region, are obtained by applying a finite-difference time-domain method to solve Maxwell's equations. The electromagnetic properties of the discharge load are described using a conductivity model. The spatial electric field patterns, natural frequencies, stored energy, and quality factor of a plasma-loaded, microwave-resonant cavity are simulated. Additionally, the simulated results for a simplified plasma source structure are compared to a known analytical solution to verify the simulation technique.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1144874
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  • 9
    Digitale Medien
    Digitale Medien
    Discharge characteristics of a 5 cm multipolar electron cyclotron resonance ion source (abstract)a) : Proceedings of 5th international conference on ion sources (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1310-1310 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: A compact 5-cm-diam multipolar electron cyclotron resonance (ECR) ion source is characterized. The source is experimentally studied with no grids using argon gas with 50–250 W of 2.45-GHz microwave input power. Using a microcoaxial probe it was confirmed that the exciting electromagnetic fields within the resonant cavity were indeed TE111, as expected from the critical cavity dimensions. Double Langmuir probe measurements indicate high densities of about (4–5)×1011/cm3 near the source, and 5 cm downstream from the source output the densities become very uniform with a value of about 5×1010/cm3 over a 10-cm diameter. Electron energy distribution functions (EEDFs) were measured using a single Langmuir probe. Average electron energies were seen to be about 8–10 eV with an energy distribution function falling between a Maxwellian and a Druyvesteyn distribution. Ion energy distribution functions (IEDF) were measured with a multigrid energy analyzer. It was seen that the distribution functions were narrow and peaked [with a full width half maximum (FWHM) of about 5 eV] except under certain conditions. Above 200-W input power, and also below about 0.5 mTorr there is significant broadening of the ion distribution function. It is speculated that the former may be caused by gas heating, and the latter may be caused by the presence of Ar+2 ions. With its high current densities ((approximately-greater-than)10 mA/cm2) and low average ion energies (〈40 eV), it is expected that this ion/plasma source will be very useful in many etching and deposition applications.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1144990
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  • 10
    Digitale Medien
    Digitale Medien
    Modeling the electromagnetic excitation of a compact ECR ion/free radical source (abstract)a) : Proceedings of 5th international conference on ion sources (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1312-1312 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: The electromagnetic excitation of a discharge inside a microwave plasma source has been numerically modeled in the time domain. The source is a cylindrical, single-mode microwave-excited cavity. The time-varying electromagnetic fields inside the resonant cavity, both inside and outside the discharge region, are obtained by applying a finite-difference time-domain method to solve Maxwell's equations. The electromagnetic properties of the discharge load are described using a conductivity model. The spatial electric field patterns, natural frequencies, stored energy, and quality factor of a plasma-loaded, microwave-resonant cavity are simulated. Additionally, the simulated results for a simplified plasma source structure are compared to a known analytical solution to verify the simulation technique.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1144993
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