Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
67 (1996), S. 2370-2371
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A simple substrate heater for oxide film deposition is presented. Its main features are (a) good thermal contact between temperature sensor, heater, and substrate and (b) compatibility with oxidizing atmosphere at high temperatures. The system shows a good response for the deposition conditions necessary in high-Tc cuprate materials. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1147003
Permalink
Library |
Location |
Call Number |
Volume/Issue/Year |
Availability |