ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
Nano-structured carbon nitride film, which is a new sensor material, has been prepared byfacing target magnetron sputter for microsensor applications. Surface morphology, surface roughnessand bonding structures of the films were investigated by EDS, SEM, AFM and FTIR spectroscopy.The growth rate of film is about 2.2 um/hr, and grain size and RMS roughness are about 320 nm and0.9 nm, respectively. The impedance of micro-humidity-sensor, which was fabricated by theconventional semiconductor fabrication process including lift-off technique, changed 95.4 kΩ to 2kΩ in the relative humidity range of 5 % to 95 %
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/23/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.121-123.1199.pdf
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