Skip to main content
SpringerLink
Log in

Effects of an sem video system on the accuracy in element size determination

  • Opticophysical Measurements
  • Published:
Measurement Techniques Aims and scope

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Literature cited

  1. I. Browday and J. Merey, The Physical Principles of Microtechnology [Russian translation], Mir, Moscow (1985).

    Google Scholar 

  2. A. V. Nikitin, Elektron. Prom., No. 3, 41 (1984).

    Google Scholar 

  3. R. M. Ammosov et al., Elektron. Tekh. Ser. 3, Mikroelectron., No. 5, 129 (1982).

    Google Scholar 

  4. R. M. Ammosov et al., Elektron Tekh., Ser. 3, Mikroelectron., No. 2, 37 (1983).

    Google Scholar 

  5. R. M. Ammosov et al., Elektron Tekh., Ser. 3, Mikroelectron., No. 3, 16 (1985).

    Google Scholar 

  6. A. M. Bonch-Bruevich, Electronics in Experimental Physics [in Russian], Nauka, Moscow (1966).

    Google Scholar 

  7. B. Gould and L. Rabiner, Theory and Application of Digital Signal Processing [Russian translation], Mir, Moscow (1978).

    Google Scholar 

Download references

Authors
  1. V. V. Zheleznov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. V. Yu. Kochetkov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. V. Nikitin
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Translated from Izmeritel'naya Tekhnika, No. 2, pp. 30–31, February, 1990.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Zheleznov, V.V., Kochetkov, V.Y. & Nikitin, A.V. Effects of an sem video system on the accuracy in element size determination. Meas Tech 33, 134–136 (1990). https://doi.org/10.1007/BF00866268

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00866268

Keywords

Search

Navigation