Abstract
We examine the problem of high accuracy SEM measurement. We have developed a calibration method that eliminates the operator from the procedure and thereby removes the main source of random error.
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Translated from Izmeritel'naya Tekhnika, No. 9, pp. 33–35, September, 1995.
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Kozlitin, A.I., Nikitin, A.V. & Repin, O.I. Calibration of a scanning electron microscope with a diffraction grating. Meas Tech 38, 1003–1006 (1995). https://doi.org/10.1007/BF00979079
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DOI: https://doi.org/10.1007/BF00979079