Abstract
An implied analytical condition, connecting the incidence angles θ o and θ e between the two intersecting microfacet normals and the ion beam direction, has been inferred for the existence of local quasi-stable intersections (angular points) during ion erosion. This condition, which can also be deduced on the basis of the erosion slowness curve, leads to a higher degree algebraic equation with a parameter, applicable for any dependence S=S (θ), expressed as an algebraic polynomial expression in cos θ. A new graphical method for evaluation of orientations θ e compatible with a given orientation θ o, based on a known polar diagram cursor-type, has also been proposed.
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Vasiliu, F., Frunza, S. Analytical and graphical evaluation of local quasi-stable angular points during ion bombardment at oblique incidence. J Mater Sci 18, 3562–3570 (1983). https://doi.org/10.1007/BF00540728
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DOI: https://doi.org/10.1007/BF00540728