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Surface damage produced by sputtering of silicon

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References

  1. D. J. Barber,J. Mater. Sci. 5 (1970) 1.

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Authors and Affiliations

  1. Department of Metallurgy, University of Oxford, UK

    S. M. Davidson

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  1. S. M. Davidson
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Davidson, S.M. Surface damage produced by sputtering of silicon. J Mater Sci 7, 473–474 (1972). https://doi.org/10.1007/BF00553772

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  • DOI: https://doi.org/10.1007/BF00553772

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