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Growth Mechanism of PbTiO3 Films by Metal Organic Chemical Vapor Deposition from Pb(DPM)2, Ti(DPM)2(i-OPr)2 and O2

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Chemical System Engineering, Faculty of Engineering, University of Tokyo, Bunkyo-ku, Tokyo, 113, Japan

    K. Nishioka

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  1. K. Nishioka
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  2. T. Osawa
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Nishioka, K., Osawa, T. Growth Mechanism of PbTiO3 Films by Metal Organic Chemical Vapor Deposition from Pb(DPM)2, Ti(DPM)2(i-OPr)2 and O2. Journal of Materials Science Letters 17, 1653–1655 (1998). https://doi.org/10.1023/A:1006650229131

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  • DOI: https://doi.org/10.1023/A:1006650229131

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