Skip to main content
SpringerLink
Log in

Nodular defect growth in thin films

  • Papers
  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

The formation and microstructure of nodular defects in thin films of sputtered Ti and evaporated MgF2 are studied and modelled. Unintentional nodular defects in Ti occurred from growth onto uncleaned substrates whereas nodule growth in MgF2 was initiated by seeding the substrate with polystyrene spheres. Nodules grew in a characteristic shape consisting of a cone with a domed top, and with the nodule separated from the bulk of the film by a low density boundary. Simulation of nodule growth by a ballistic deposition model in two and three dimensions confirmed this nodular shape, but also predicted that a low density region extends into the nodule from the boundary. Further predictions of the minimum seed size required to initiate nodule growth lead to suggestions for a technique for film adatom mobility measurement.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. W. PATTEN,Thin Solid Films 63 (1979) 121.

    Google Scholar 

  2. T. SPALVINS, ibid.64 (1979) 143.

    Google Scholar 

  3. K. H. GUENTHER,Appl. Opt. 20 (1981) 1034.

    Google Scholar 

  4. J. A. THORNTON,A. Rev. Mater. Sci. 7 (1977) 239.

    Google Scholar 

  5. B. LIAO, D. J. SMITH and B. McINTYRE, in Proceedings of the 17th Annual Boulder Damage Symposium, Boulder, 1985, edited by H. E. Bennett (National Bureau of Standards Publication no. 746, 1988) p. 305.

  6. K. H. GUENTHER, in Proceedings of Optical Thin Films II, San Diego, 1986 (SPIE vol. 678, 1986) p. 2.

  7. D. J. SMITH, in Proceedings of Modelling of Optical Thin Films, San Diego, 1987 (SPIE vol. 821, 1987) p. 120.

  8. T. SMY, K. L. WESTRA and M. J. BRETT,IEEE Trans. Elec. Devices 37 (1990) 591.

    Google Scholar 

  9. M. J. BRETT,J. Mater. Sci. 24 (1989) 623.

    Google Scholar 

  10. R. N. TAIT, T. SMY and M. J. BRETT,Thin Solid Films 187 (1990) 375.

    Google Scholar 

  11. Idem., J. Vac. Sci. Technol. A8 (1990) 1593

    Google Scholar 

  12. R. RAMANLAL and L. M. SANDER,Phys. Rev. Lett. 54 (1985) 1828.

    Google Scholar 

  13. H. J. LEAMY, G. H. GILMER and A. G. DIRKS,Curr. Topics. Mater. Sci. 6 (1980) 309.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electrical Engineering, University of Alberta, T6G 2G7, Edmonton, Alberta, Canada

    M. J. Brett, R. N. Tait, S. K. Dew, S. Kamasz & A. H. Labun

  2. Department of Electronics, Carleton University, K1S 5B6, Ottawa, Ontario, Canada

    T. Smy

Authors
  1. M. J. Brett
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. R. N. Tait
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. K. Dew
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. S. Kamasz
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. H. Labun
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. T. Smy
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Brett, M.J., Tait, R.N., Dew, S.K. et al. Nodular defect growth in thin films. J Mater Sci: Mater Electron 3, 64–70 (1992). https://doi.org/10.1007/BF00701096

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00701096

Keywords

Search

Navigation