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KOR negative photoresist in integrated optics

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Abstract

Tests on Kodak Ortho Resist (KOR) have been made for application to integrated optics. This material is interesting with respect to other photoresists for its high sensitivity over a wide wavelength range. Optical waveguides and gratings have been realized with KOR. In particular gratings with high frequency have been used to test the possibility of air-film coupling via their evanescent diffracted waves.

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Authors and Affiliations

  1. Instituto di Ricerca sulle Onde Elettromagnetiche del CNR, 50127, Firenze, Italy

    G. -C. Righini, V. Russo & S. Sottini

Authors
  1. G. -C. Righini
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  2. V. Russo
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  3. S. Sottini
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Righini, G.C., Russo, V. & Sottini, S. KOR negative photoresist in integrated optics. Opt Quant Electron 7, 447–450 (1975). https://doi.org/10.1007/BF00619320

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