Abstract
The authors studied the oxidation of thin aluminum films free of oxide layers in situ prepared by evaporation directly in the electron microscope under ultra-high-vacuum conditions. The oxidation was realized at various temperatures (350–500°C) and at various oxygen pressures (1–10−3 Pa). The formation and growth of the amorphous and crystalline products have been studied.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
H. M. Flower,J. Microsc. (Oxford) 97, 171 (1973).
M. J. Dignam,J. Electrochem. Soc. 109, 184 (1962).
P. E. Doherty and R. S. Davis,J. Appl. Phys. 34, 619 (1963).
M. J. Dignam, W. R. Fawcett, and H. Böhni,J. Electrochem. Soc. 113, 656 (1966).
R. K. Hart and J. K. Maurin,Surf. Sci. 20, 285 (1970).
E. Suito, M. Shiojiri, and H. Morikawa,Jpn. J. Appl. Phys. 5(12), 1197 (1962).
G. M. Scamans and E. P. Butler,Metall. Trans. 6A, 2055 (1975).
Á. Barna, P. B. Barna, J. Pócza, and I. Pozsgai,Thin Solid Films 5, 201 (1970).
Á. Barna, P. B. Barna, and J. Pócza,7th Intern. Congr. Electron Microsc., Grenoble, Pierre Favard, ed., (Société Française de Microscopie Electronique, Paris, France, 1970), p. 445.
H. Birey,J. Appl. Phys. 45, 3946 (1974).
R. B. Pettit and J. Silcox,J. Appl. Phys. 45, 2856 (1974).
K. Heinemann, D. Bhogeswara Rao, and D. L. Douglass,Oxid. Met. 9, 379 (1975).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Csanády, Á., Barna, Á. & Barna, P.B. The direct observation and investigation of the oxidation of aluminum in the transmission electron microscope. Oxid Met 13, 245–254 (1979). https://doi.org/10.1007/BF00603669
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF00603669