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Formation and evolution of the phase composition and associated properties during the growth of thin films

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Abstract

A complete system of equations describing the evolution of the phase composition of islands in the Ostwald ripening stage during the growth of thin films is derived and a solution is found. The distribution function of islands of solid solutions is obtained for different growth mechanisms. A general approach to controlling the phase composition and associated properties (electrical, optical, strength, and so on) in the multicomponent systems formed is developed. The investigation is conducted for the example of thin multicomponent films. It is shown that the greatest possibilities for controlling these properties are at the Ostwald ripening stage and in the presence of nonlinear phenomena such as self-oscillation or self-organization. A relation is found between the size and composition of the new-phase nuclei which form during the condensation of films of solid solutions. A system of equations describing the evolution of the distribution function of properties in island films of solid solutions as a function of the external parameters of the system is derived and solved. It is shown that a strong dependence of the composition on the external parameters appears for islands with radius R⩽10−8 m, irrespective of the type of material. A diagram of the coexistence of the corresponding properties in concentration-temperature coordinates is constructed for island films of stoichiometric compounds; this makes it possible to determine the necessary conditions for obtaining such films. It is predicted that various properties in multicomponent systems which undergo a first-order phase transition can vary periodically in time and space.

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Authors and Affiliations

  1. Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, 199178, St. Petersburg, Russia

    S. A. Kukushkin & A. V. Osipov

Authors
  1. S. A. Kukushkin
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  2. A. V. Osipov
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Zh. Tekh. Fiz. 67, 112–120 (October 1997)

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Kukushkin, S.A., Osipov, A.V. Formation and evolution of the phase composition and associated properties during the growth of thin films. Tech. Phys. 42, 1212–1219 (1997). https://doi.org/10.1134/1.1258824

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  • DOI: https://doi.org/10.1134/1.1258824

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