Abstract
Holes in polypropylene (PP) and polymethylmethacrylate (PMMA) plates, 0.5 mm in thickness were drilled by irradiation with up to 3000 pulses of KrF-excimer laser radiation (λ = 248 nm) at fluences per pulse ɛ in the range 0.1–10 J/cm2, conditions which yield a laser-induced plasma/vapor plume. The process was analyzed experimentally in terms of material removal rate, optical emission of the laser-induced plasma, hole geometry, debris production at the hole edge, and chemical changes in the polymer induced by the laser irradiation. Additionally, the process was simulated using a model based on degradation of the polymer induced by optical absorption and heating, leading to gas-phase products. Such characteristics as the material removal rate as a function of fluence, the nature of the gas phase products and the deposition of debris were calculated.
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Received: 15 September 1998 / Accepted: 6 February 1999
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Wesner, D., Aden, M., Gottmann, J. et al. Material removal and chemical and structural changes induced by irradiation of polymer surfaces with KrF-excimer laser radiation. Fresenius J Anal Chem 365, 183–187 (1999). https://doi.org/10.1007/s002160051469
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DOI: https://doi.org/10.1007/s002160051469