Skip to main content
SpringerLink
Log in

Beryllium diffusion across GaAs/(Al, Ga)As heterojunctions and GaAs/AlAs superlattices during MBE growth

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Beryllium diffusion during MBE growth of (Al, Ga)As layers, (Al, Ga)As/GaAs heterojunctions and GaAs/AlAs superlattices has been studied by electrochemical C-V and secondary ion mass spectrometry (SIMS) concentration profiling, in conjunction with transmission electron microscopy. Diffusion times were comparatively short since they were limited to part of the growth sequence, so non-equilibrium effects had a significant influence. The results are consistent with an interstitial-substitutional mechanism in which lattice site incorporation becomes more difficult with increasing band gap enthalpy. Incorporation involves a “kick-out” reaction which leads to the observed disordering of the superlattices.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. W.D. Laidig, N. Holonyak, Jr., M.D. Camras, K. Hess, J.J. Coleman, P.D. Dapkus, J. Bardeen: Appl. Phys. Lett.38, 776 (1981)

    Google Scholar 

  2. M.D. Camras, N. Holonyak, Jr., K. Hess, M.J. Ludowise, W.T. Dietze, C.R. Lewis: Appl. Phys. Lett.42, 185 (1983)

    Google Scholar 

  3. Luisa Gonzalez, J.B. Clegg, D. Hilton, J.P. Gowers, C.T. Foxon, B.A. Joyce: Appl. Phys. A41, 237 (1986)

    Google Scholar 

  4. M. Kawabe, N. Shimizu, F. Hasegawa, Y. Nannichi: Appl. Phys. Lett.46, 849 (1985)

    Google Scholar 

  5. K. Inoue, H. Sakaki, J. Yoshino: Appl. Phys. Lett.46, 973 (1985)

    Google Scholar 

  6. M. Heiblum: J. Vac. Sci. Technol. B3, 820 (1985)

    Google Scholar 

  7. Y. Matsumoto: Japan. J. Appl. Phys.22, 829 (1983)

    Google Scholar 

  8. B. Tuck, M.A.H. Kadheim: J. Mater. Sci.7, 581 (1972)

    Google Scholar 

  9. P. Enquist, G.W. Wicks, L.F. Eastman, C. Hitzman: J. Appl. Phys.58, 4130 (1985)

    Google Scholar 

  10. Y.C. Pao, T. Hierl, T. Cooper: J. Appl. Phys.60, 201 (1986)

    Google Scholar 

  11. U. Gösele, F. Morehead: J. Appl. Phys.52, 4617 (1981)

    Google Scholar 

  12. R.L.S. Devine: Ph. D. Thesis, University of Glasgow (1985)

  13. J.W. Lee, W.D. Laidig: J. Elect. Mat.13, 147 (1984)

    Google Scholar 

  14. J.A. Van Vechten: J. Vac. Sci. Technol. B2, 569 (1984)

    Google Scholar 

  15. S. Yamahata, S. Adachi, T. Ishibashi: J. Appl. Phys.60, 2814 (1986)

    Google Scholar 

Download references

Author information

Author notes

  1. R. L. S. Devine

    Present address: Division of Microstructural Sciences, National Research Council, Ottawa, Ontario, Canada

Authors and Affiliations

  1. Philips Research Laboratories, RH1 5HA, Redhill, Surrey, UK

    R. L. S. Devine, C. T. Foxon, B. A. Joyce, J. B. Clegg & J. P. Gowers

Authors
  1. R. L. S. Devine
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. C. T. Foxon
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. B. A. Joyce
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. J. B. Clegg
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. J. P. Gowers
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Devine, R.L.S., Foxon, C.T., Joyce, B.A. et al. Beryllium diffusion across GaAs/(Al, Ga)As heterojunctions and GaAs/AlAs superlattices during MBE growth. Appl. Phys. A 44, 195–200 (1987). https://doi.org/10.1007/BF00626423

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00626423

PACS

Search

Navigation