Abstract
The capacitance and voltage (C-V) characteristics of metal, oxide, and semiconductors (MOS) capacitors passivated by SrF2-B2O3-GeO2-SiO2 glasses with various water and fluoride contents were investigated. As the OH− absorption coefficient of a glass increased, adverse effects on the recovery of shifts of the hysteresisC-V curve have been observed. The water content of ions is closely related to the fluoride content in the SrF2-B2O3-GeO2-SiO2 glass. The viscous-flow transition point of glass was lowered with increasing degree of ionic character obtained from Hannay's equation.
Similar content being viewed by others
References
K.H. Hurley: Solid State Technol. (March 1987) p. 103
J.E. Dickinson Jr., B.H.W.S. deJong: J. Non-Cryst. Solids102, 196 (1988)
N.F. Raley, D.L. Losee: J. Electrochem. Soc.135, 2640 (1988)
G.L. Schnable, A.W. Fisher, J.M. Shaw: J. Electrochem. Soc.135, 3973 (1990)
K. Kobayashi: J. Non-Cryst. Solids88, 229 (1986)
K. Kobayashi: J. Non-Cryst. Solids (submitted)
S. Rojas, R. Gomarasca, Zanotti, A. Borghesi, A. Sassela, G. Ottaviani, L. Moro, P. Lazzeri: J. Vac. Sci. Technol. B10, 633 (1992)
S.C. Li, S.P. Murarka, X.S. Guo, W.A. Lanford: J. Appl. Phys.72, 2947 (1992)
K. Kobayashi: J. Non-Cryst. Solids124, 229 (1990).
G. Baret, R. Madar, C. Bernar: J. Electrochem. Soc.138, 2835 (1991)
K. Kobayashi: J. Non-Cryst. Solids159, 274 (1993)
K. Kobayashi: Glass Technol.29, 253 (1988)
K. Kobayashi: Glass Technol.30, 110 (1989)
N.B. Hannay, C.P. Smyth: J. Am. Chem. Soc.68, 171 (1946)
C.M. Shaw, J.E. Shelby: Phys. Chem. Glasses34, 35 (1993)
K. Kobayashi: Glass Technol.34, 120 (1993)
J.A. Ruller, J.E. Shelby: Phys. Chem. Glasses33, 177 (1992)
Liang Zhenhua, G.H. Frischat: J. Non-Cryst. Solids163, 169 (1993)
S.J. Pearton, J.W. Corbett, M. Stavola:Hydrogen in Crystalline Semiconductors, Springer Ser. Mater. Sci., Vol. 16 (Springer, Berlin, New York 1992)
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Kobayashi, K., Mizushima, I. Ionic character of SrF2-B2O3-GeO2-SiO2 glasses for viscous flow and their applications to MOS capacitors. Appl. Phys. A 62, 313–315 (1996). https://doi.org/10.1007/BF01594228
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF01594228