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A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors

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can be detected by its adsorption on a Pt-coated sensor because a change in surface stress causes a static bending of the sensor. The diffusion of various alcohols into polymethylmethacrylate induces resonance frequency shifts in a dynamic measuring mode and bending in the static mode, which allows one to distinguish between the various alcohols.

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Authors and Affiliations

  1. IBM Research Division, Zurich Research Laboratory, Säumerstrasse 4, CH–8803 Rüschlikon, Switzerland, , , , , , CH

    H.P. Lang, R. Berger, C. Andreoli, J. Brugger, P. Vettiger, M. Despont, C. Gerber & J.K. Gimzewski

  2. Institute of Physics, University of Basel, Klingelbergstrasse 82, CH-4056 Basel, Switzerland, , , , , , CH

    F. Battiston, J.-P. Ramseyer, E. Meyer & H.-J. Güntherodt

  3. Paul-Scherrer-Institute, Laboratory for Micro- and Nanostructures, CH-5232 Villigen-PSI, Switzerland, , , , , , CH

    T. Mezzacasa & L. Scandella

Authors
  1. H.P. Lang
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  2. R. Berger
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  3. F. Battiston
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  4. J.-P. Ramseyer
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  5. E. Meyer
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  6. C. Andreoli
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  7. J. Brugger
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  8. P. Vettiger
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  9. M. Despont
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  10. T. Mezzacasa
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  11. L. Scandella
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  12. H.-J. Güntherodt
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  13. C. Gerber
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  14. J.K. Gimzewski
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Received: 25 July 1997/Accepted: 1 October 1997

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Lang, H., Berger, R., Battiston, F. et al. A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors . Appl Phys A 66 (Suppl 1), S61–S64 (1998). https://doi.org/10.1007/s003390051100

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  • DOI: https://doi.org/10.1007/s003390051100

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