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In situ observation of thermal annealing processes of nanoholes on Si(111) 7 × 7

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Received 25 July 1997/Accepted 1 October 1997

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Kraus, A., Hildebrandt, S., Kulla, R. et al. In situ observation of thermal annealing processes of nanoholes on Si(111) 7 × 7 . Appl Phys A 66 (Suppl 1), S953–S957 (1998). https://doi.org/10.1007/s003390051273

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  • DOI: https://doi.org/10.1007/s003390051273

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