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Temperature distribution above a heated surface in a CVD reactor with hydrocarbon-containing gaseous mixtures

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Abstract.

Pyrolysis of C2H2 and CH4 gases near a heated surface was investigated using coherent anti-Stokes Raman spectroscopy (CARS). Gas temperature and hydrocarbon density spatial profiles above the surface of deposition were measured. Although the measured hydrocarbon density distribution above the surface showed a gradual decrease upon approaching the surface, the observed temperature distribution revealed the presence of a temperature maximum at distances of 300–600 μm from the surface. The appearance of this maximum is explained by the release of condensation energy in the region where intensive homogeneous nucleation of carbon clusters takes place.

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Authors and Affiliations

  1. General Physics Institute of Russian Academy of Sciences, Vavilov str. 38, 117942, Moscow, Russia, , , , , , RU

    S.Y. Volkov, D.N. Kozlov & V.V. Smirnov

  2. Laser-Laboratorium Göttingen e.V., Hans-Adolf-Krebs-Weg 1, D-37077 Göttingen, Germany, , , , , , DE

    G. Marowsky

Authors
  1. S.Y. Volkov
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  2. D.N. Kozlov
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  3. V.V. Smirnov
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  4. G. Marowsky
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Received: 7 December 1998 / Revised version: 21 May 1999 / Published online: 16 September 1999

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Volkov, S., Kozlov, D., Smirnov, V. et al. Temperature distribution above a heated surface in a CVD reactor with hydrocarbon-containing gaseous mixtures . Appl Phys B 70, 123–126 (2000). https://doi.org/10.1007/s003400050019

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  • DOI: https://doi.org/10.1007/s003400050019

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