A Method of Electron Diffraction Intensity Correction in Combination with High-Resolution Electron Microscopy

An empirical method is proposed for partially correcting the distortion of electron diffraction intensity caused by Ewald-sphere curvature, crystal bending, thickness inhomogeneity etc. The method is based on the combination of electron diffraction and high-resolution electron microscopy. It has been tested with a crystal of high-temperature superconducting oxide YBa₂Cu₃O_7-x and shown to be effective.