Abstract
The flux of neutral particles sputtered from clean polycrystalline targets of 11 metals has been studied by mass spectrometry after being postionized in a low pressure hf plasma. Besides atoms Me1, postionized metal molecules Me2 and Me3 have been detected. The energyE 0 of the bombarding Ar+ ions has been varied between 100 and 1000 eV. Considering the different plasma influences, an attempt is made to obtain the initial composition of the beam of sputtered neutrals from the ratiosR 21 andR 31 of postionized molecules Me2 and Me3 to postionized atoms, Me1, respectively. The influence of the bombarding energyE 0 onR 21 has been measured for all target elements, onR 31 for Pd and Ag. The yields of Me2 atE 0=1 keV approximately appear to be proportional to the square of the total sputtering yieldS for the different target materials. This behaviour and the energy dependence ofR 21 andR 31 are discussed in view of a possible molecule formation process in sputtering.
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This paper essentially contains results of the Dissertation of W. Gerhard, Würzburg, W.-Germany, 1973.
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Gerhard, W., Oechsner, H. Mass spectrometry of neutral molecules sputtered from polycrystalline metals by Ar+-ions of 100–1000 eV. Z Physik B 22, 41–48 (1975). https://doi.org/10.1007/BF01325458
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DOI: https://doi.org/10.1007/BF01325458