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Thermal evolution of high dose Fe implanted Si(100) at 623 K: A CEMS study

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Abstract

Hyperfine interactions associated to the phases produced by 623 K Fe implantation into Si(100) and by subsequent thermal treatments at temperatures up to 1273 K have been studied by conversion electron Mössbauer spectroscopy. The results suggest that in the as implanted sample the short range order around the 57Fe probes is \beta-FeSi2-like. This phase orders with a thermal treatment at 773 K. A preferential orientation of the electric field gradient was detected from the relative height of the quadrupole interaction components. It was found that the transition to the high temperature phase \alpha-FeSi2 occurred at least 50 K below the reported value.

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Sánchez, F., Desimoni, J. Thermal evolution of high dose Fe implanted Si(100) at 623 K: A CEMS study. Hyperfine Interactions 110, 199–207 (1997). https://doi.org/10.1023/A:1012639803183

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