Sputtering of two-phase Ag_xCu_x alloys

Abstract

Elemental sputtering yields from two phase AgCu alloys were measured for 20, 40 and 50 at% Ag. Argon ion bombardment energies were in the range 35–55 keV and the ion dose was 1×10¹⁹ ions cm⁻². The sputtering yield for silver was found to be considerably below what was expected by simple selective sputtering of a two component alloy. Analysis by electron probe X-ray microanalysis and scanning electron microscopy of the eroded surface indicated that surface diffusion of copper from copper rich grains and geometrical constraints in the dense cone forest on Cu/Ag eutectic regions combine to reduce the sputtering yield for silver.