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Preparation and characterization of radio-frequency-sputtered Ba2Si2TiO8 thin films

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Abstract

Radio-frequency-sputtered barium titanium silicate (BST, Ba2Si2TiO8) thin films were grown on crystalline Si (100) substrates and were characterized using wavelength-dispersive spectrometry (WDS), X-ray diffraction (XRD), optical microscopy (OM) and scanning electron microscopy (SEM), and diagonal techniques for dielectric properties. The chemical compositions of the films increasingly deviated from stoichiometry with film thickness. At the initial stage of deposition the grain configuration is dependent on the Si substrate texture. XRD analysis indicates that the BST films deposited at an optimum substrate temperature of 845 °C were strongly c-axis oriented, and that the film orientation is manipulated by substrate temperature and supersaturation. The corresponding film-growth rate in the direction normal to the film surface at 845 °C was 1.95 nm min−1 at the initial stage, and decreased with sputtering time. The as-deposited films have a room-temperature bulk resistivity of 1.8 ×107 Ωm in the direction of thickness and an isotropic surface resistivity of 1.5×103 Ωm. The high-frequency relative dielectric constant, 0.05 at frequencies higher than 9 MHz, is lower than that of many typical piezoelectric materials. The high-frequency impedance character is typical of piezoelectric materials, giving a minimum impedance frequency of 9.0 MHz and a serial resonant frequency at about 9.5 MHz.

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References

  1. J. T. Alfors, M. C. Stinson, R. A. Matthews and A. Pabst, The American Mineralogist 50 (1965) 314.

    CAS  Google Scholar 

  2. R. Masse, J. C. Grenier and A. Durif, Bull. Soc. fr Minéral. Cristaltogr. NC (1967) 20.

  3. M. Kimura, Y. Fuino and T. Kawamura, Appl. Phys. Lett. 29 (1967) 227.

    Article  Google Scholar 

  4. M. Kimura, J. Appl. Phys. 48 (1977) 2850.

    Article  CAS  Google Scholar 

  5. A. Halliyal, A. S. Bhalla, S. A. Markgraf, L. E. Gross and R. E. Newnham, Ferroelectrics 62 (1985) 27.

    Article  CAS  Google Scholar 

  6. J. Melngalis, J. F. Vetelino, A. Jhunjhunwala, T. B. Reed, R. E. Fahey and E. Stern, Appl. Phys. Lett. 32 (1978) 203.

    Article  Google Scholar 

  7. H. Yamauchi, J. Appl. Phys. 49 (1978) 6162.

    Article  CAS  Google Scholar 

  8. G. R. Barsh and R. E. Newnham, United States Air Force Report No. AFCRL-TR-75 (1975) 0163.

  9. H. Yamauchi, K. Yamashita and H. Takauchi, J. Appl. Phys. 50 (1979) 3160.

    Article  CAS  Google Scholar 

  10. K. Tsubouchi, K. Sugai and N. Mikoshiba, in Proceedings of the Ultrasonic Symposium Vol. 1, November 5–7, 1980, Boston, MA, edited by B. R. McAvoy (IEEE, New York, 1980) p. 446.

    Chapter  Google Scholar 

  11. H. Yamauchi, R. J. White, M. Ayukawa, T. C. Marray and J. W. Robinson, J. Mater. Res. 3 (1988) 105.

    Article  CAS  Google Scholar 

  12. R. J. White, M. Ayukawa, G. Demaggio, J. W. Robinson and M. Yamauchi, in “High Tech ceramics”, edited by P. Vincenzini (Elsevier Science, Amsterdam, 1987) p. 657.

    Google Scholar 

  13. P. M. Kawa, C-axis Oriented Ba2Si2TiO8 Thin Films, M.S. thesis, University of Windsor, Ontario, Canada (1988) p. 1.

    Google Scholar 

  14. Y. Li, B. S. Chao and H. Yamauchi, in Proceedings of the Third Canadian Material Science Conference, June 18–21, 1991, Kingston, Ontario (Royal Military College of Canada, 1991) p. 10.

  15. Y. Li, B. S. Chao and H. Yamauchi, J. Appl. Phys. 71 (1992) 4903.

    Article  CAS  Google Scholar 

  16. Idem, ‘Effect of substrate texture on orientations of rf sputtered Ba2Si2TiO8 thin films”, unpublished.

  17. Idem, ibid.

  18. L. L. Kazmerski, in “Polycrystalline and amorphous thin films and devices” (Academic Press, New York, 1980) p. 4.

    Google Scholar 

  19. J. W. Mathews, in “Physics of thin films”, edited by G. Hass and P. E. Thun, Vol. 4 (Academic Press, New York, 1967) p. 137.

    Google Scholar 

  20. J. L. Kenty and J. P. Hirth, Surf. Sci. 15 (1969) 403.

    Article  Google Scholar 

  21. H. Sato and S. Shinozaki, Surf. Sci. 22 (1970) 229.

    Article  CAS  Google Scholar 

  22. X-ray Powder Diffraction File No. 22-513 (Joint Committee on Powder Diffraction Standards, Swarthmore, PA, 1972).

  23. S. O. Hyatt, “Reactive sputtered TiN thin films for diffusion barriers”, PhD dissertation, University of Windsor, Ontario, Canada (1990) p. 40.

    Google Scholar 

  24. L. I. Maissel, in “Handbook of thin film technology”, edited by L. I. Maissel and R. Glang (McGraw-Hill, New York, 1970) p. 13–6.

    Google Scholar 

  25. J. L. Vossen, J. Vac. Sci. Tech. 8 (1971) S12.

    Article  CAS  Google Scholar 

  26. K. Reichett and X. Jian, Thin Solid Films 191 (1990) 91.

    Article  Google Scholar 

  27. R. J. White, “Fresnoite ceramics and their thin films”, M.S. Thesis, University of Windsor, Windsor, Ontario, Canada (1986) p. 125.

    Google Scholar 

  28. X-ray Powder Diffraction File No. 5-626 (Joint Committee for Powder Diffraction Standards — JCDD, Swarthmore, PA, 1953).

  29. J. P. Hirth and G. M. Pound, in “Condensation and evaporation: Nucleation and growth kinetics”, progress in Materials Science, Vol. 11 (The Macmillan Co, New York, 1963) p. 41.

    Google Scholar 

  30. J. A. Thornton, Ann. Rev. Mater. Sci. 7 (1977) 239.

    Article  CAS  Google Scholar 

  31. J. G. Simmos, in “Handbook of thin films technology”, edited by L. I. Maissel and R. Glang (McGraw-Hill, New York, 1970) Ch. 14, pp. 14–1.

    Google Scholar 

  32. S. Iida, K. Oono, T. Kamimae and H. Kumagaya, in “Handbook of physics” (Science Press. Beijing, 1969) p. 138.

    Google Scholar 

  33. J. Chen and Z. Liu, in “Dielectric physics” (Mechanical Industry Press, Beijing, 1982) p. 287.

    Google Scholar 

  34. Y. Liu and C. Qiu, in “Measurement technique for electrical insulation” (Mechanical Industry Press, Beijing, 1981) p. 43.

    Google Scholar 

  35. Y. Li, Z. Qin and Z. Zhou, in “Measurement of piezoelectric and ferroelectric materials” (Science Press, Beijing, 1984) p. 329.

    Google Scholar 

  36. A. J. Slobodik and J. C. Sethares, United States Air Force Report No. AFCAL-71-0570 (1971) 10.

  37. T. Yamada, Jpn. J. Appl. Phys. 6 (1967) 151.

    Article  CAS  Google Scholar 

  38. D. A. Berlincourt, in Proceedings of the National Electronics Conference Vol. 11 (1955) 777.

    Google Scholar 

  39. D. A. Berlincourt, D. R. Curran and H. Jaffe, in “Physical acoustics”, Vol. I, edited by W. P. Mason (Academic Press, New York, 1964) p. 169.

    Chapter  Google Scholar 

  40. V. V. Daniel, in “Dielectric relaxation” (Academic Press, London, 1967) Ch. 2, p. 13.

    Google Scholar 

  41. A. R. Von Hippel, in “Dielectric materials and applications”, edited by A. R. von Hippel (Technical Press of MIT and John Wiley, New York, 1954) p. 18.

    Google Scholar 

  42. H. Fröhlich, “Theory of dielectrics” (Clarendon Press, Oxford, 1958) p. 21.

    Google Scholar 

  43. A. S. Nowick and W. R. Heller, Adv. in Phys. 12 (1963) 251.

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Engineering Materials Group, Mechanical Engineering Department, University of Windsor, N9B 3P4, Windsor, Ontario, Canada

    Yi Li, P. M. Kawa & W. V. Youdelis

  2. Energy Conversion Devices, Incorporated Troy, 48084, MI, USA

    B. S. Chao

  3. Division II, International Superconductivity Technology Center, 10-13 Shinonome, 1-Chome, Koto-Ku, 135, Tokyo, Japan

    H. Yamauchi

Authors
  1. Yi Li
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  2. P. M. Kawa
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  3. W. V. Youdelis
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  4. B. S. Chao
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  5. H. Yamauchi
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Li, Y., Kawa, P.M., Youdelis, W.V. et al. Preparation and characterization of radio-frequency-sputtered Ba2Si2TiO8 thin films. JOURNAL OF MATERIALS SCIENCE 28, 4104–4112 (1993). https://doi.org/10.1007/BF00351240

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