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Hyun, S.H., Kim, T.Y., Kim, G.S. et al. Synthesis of low-k porous silica films via freeze drying. Journal of Materials Science Letters 19, 1863–1866 (2000). https://doi.org/10.1023/A:1006775213914
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DOI: https://doi.org/10.1023/A:1006775213914