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A radioreagent method for determination of traces of phosphorus in high-purity silicon

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Abstract

The present study explores the feasibility of the determination of phosphorus at the extreme trace levels in high-purity silicon by radioreagent method. After silicon dissolution with hydrofluoric and nitric acids and matrix volatilization, 12-molybdophosphoric acid (12-MPA) is formed by the addition of the radioreagent,99MoO 2−4 , in nitric acid medium and then extracted into isobutyl acetate. By plotting the phosphorus content against the radioactivity of99Mo in the organic phase, a linear relationship persisting down to 5 ng is obtained. Special effort has been made to the elimination of the unreacted99MoO 2−4 reagent and the optimal control of phosphorus blank introduced through the multistage analytical procedure in order to ensure reliable determination of phosphorus at the ppb level.

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Authors and Affiliations

  1. Institute of Nuclear Science, National Tsing Hua University, 300, Hsinchu, Taiwan Republic of China

    P. Y. Chen, J. S. Chen, H. J. Sun & M. H. Yang

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  1. P. Y. Chen
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  2. J. S. Chen
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  3. H. J. Sun
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  4. M. H. Yang
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Chen, P.Y., Chen, J.S., Sun, H.J. et al. A radioreagent method for determination of traces of phosphorus in high-purity silicon. Journal of Radioanalytical and Nuclear Chemistry, Articles 90, 239–245 (1985). https://doi.org/10.1007/BF02060778

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  • DOI: https://doi.org/10.1007/BF02060778

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