Abstract
Epitaxial multilayer thin films of “infinite-layer” (Sr, Ca)CuO2 and perovskite (Sr, Ca)RuO3 have been prepared on (100) SrTiO3 substrates by multitarget rf magnetron sputtering. X-ray diffraction analyses revealed that the multilayer structure of (Sr, Ca)CuO3/(Sr, Ca)RuO3 was successfully fabricated with a minimum layer thickness of 20 Å. Transmission electron microscopy measurements of the multilayers indicated that there was no dislocation which normally exists in single-layer films with an infinite-layer structure. Resistivities of multilayer films at room temperature ranged from 1 to 10 mΩ cm and showed semiconductor-like dependence against the temperature.
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Adachi, H., Satoh, T., Sakai, M. et al. Microstructure and properties of (Sr, Ca)CuO2/(Sr, Ca)RuO3 multilayers. J Supercond 7, 737–741 (1994). https://doi.org/10.1007/BF00721655
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DOI: https://doi.org/10.1007/BF00721655