Abstract
Tests on Kodak Ortho Resist (KOR) have been made for application to integrated optics. This material is interesting with respect to other photoresists for its high sensitivity over a wide wavelength range. Optical waveguides and gratings have been realized with KOR. In particular gratings with high frequency have been used to test the possibility of air-film coupling via their evanescent diffracted waves.
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Righini, G.C., Russo, V. & Sottini, S. KOR negative photoresist in integrated optics. Opt Quant Electron 7, 447–450 (1975). https://doi.org/10.1007/BF00619320
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DOI: https://doi.org/10.1007/BF00619320