Abstract
The hexacarbonyl compounds of Cr, Mo, and W have been used as precursors in plasma-enhanced chemical vapor depositions (PECVD). They form films of good adherence on glass, ceramics, and a variety of polymers. The nature of the deposits depends very much on the composition of the gas, which forms the plasma. When pure argon is used, the resulting films contain considerable amounts of oxygen and carbon. Films deposited in hydrogen/argon mixtures consist of the metal and/or the carbide. With Ar/O2 mixtures, Mo(CO)6 and W(CO)6 are converted into films of MoO3 and WO3, respectively. When H2S/H2 mixtures are used as plasma gas, Mo(CO)6 yields films consisting of MoSx.
Similar content being viewed by others
References
1.L. Mond, C. Langer, and F. Quinke,J. Chem. Soc. 57, 749 (1980).
J. J. Lander and L. H. Germer,Met. Technol. 15, TP 2259, 648 (1947); (b)Met. Ind. 71, 459 (1947); (c)Vacuum 71, 487 (1947).
B. B. Owen and R. T. Webber,Trans. ATME 175, 693 (1948).
F. Okuyama,Appl. Phys. 22, 39–46 (1980).
R. W. Bigelow, J. G. Black, C. B. Duke, W. R. Solaneck, and H. R. Thomas,Thin Solid Films 94, 233–247 (1982).
K. Petkov,Vacuum,34, 1061–1065 (1984).
G. E. Carver,Solar Energy Mater. 1, 357–367 (1979).
B. O. Seraphin,J. Vac. Sci. Technol. 16, 193–196 (1979).
B. O. Seraphin,Thin Solid Films 57, 293–2970 (1979).
H. S. Gurev, G. E. Carver, and B. O. Seraphin,Solar Energy, The Electrochemical Society (1976), pp. 36 ff.
F. Okuyama,Appl. Phys. A28, 125–128 (1982).
N. J. Janno and J. A. Plaster,Thin Solid Films 147, 193–202 (1987).
J. A. Sheward and W. J. Young,Vacuum 36, 3711 (1986).
M. Diem, M. Fisk, and J. Goldman,Thin Solid Films 107, 39–43 (1983).
F. Okuyama,J. Cryst. Growth 49, 531 (1980).
C. Oehr, Diplomarbeit Tübingen (1982).
R. Solanki, P. K. Boyer, and G. J. Collins,Appl. Phys. Lett. 41, 1048–1050 (1982).
D. K. Flynn, J. I. Steinfeld, and D. S. Sehti,J. Appl. Phys. 59, 3914–3917 (1986).
N. S. Gluck, G. J. Wolga, C. E. Bartosch, W. Ho, and Z. Ying,J. Appl. Phys. 61, 998–1005 (1987).
Y. Ishikawa, P. A. Hackett, and D. M. Rayner,J. Phys. Chem. 92, 3863–3869 (1988).
K. Reichelt and G. Mair,J. Appl. Phys. 49, 1245–1247 (1978).
T. Spalvins,Thin Solid Films 53, 285–300 (1978).
R. I. Christy,Thin Solid Films 80, 289–296 (1981).
H. Dimigen, H. Hübsch, and P. Willich,Thin Solid Films 129, 79–91 (1985).
H. Kuzano and K. Nagai,J. Vac. Sci. Technol. A 3, 1809–1812 (1985).
V. Buck,Wear 114, 263–274 (1987).
N. J. Mikkelsen, J. Chevalier, G. Sørensen, and C. A. Straede,Appl. Phys. Lett. 52, 1130–1132 (1988).
G. Brauer,Handbuch der präp. anorg. Chemie, Vol. 3, Ferdinand Enke Verlag, Stuttgart (1981), p. 1816.
G. E. Muilenberg (editor),Handbook of X-ray Photoelectron Spectroscopy, Physical Electronics Division, Perkin-Elmer Corporation, Eden Prairie, Minnesota (1979).
T. J. Wieting,J. Phys. Chem. Solids 31, 2148–2151 (1970).
Gmelin Handbuch der Anorganischen Chemie, Syst. Nr. 54, Hauptband, 18711 (1935), ErgänzungsbandB2, 1511 (1979;A3, 19411 (1987).
W. M. Greene, W. G. Oldham, and D. W. Hess,Appl. Phys. Lett. 52, 1133–1135 (1988).
R. J. Colton and J. W. Rabalais,Inorg. Chem. 15, 236 (1976).
Gmelin Handbuch der Anorganischen Chemie, Syst. Nr.53, Supplement Vol.A26, 1 ff (1988).
T. A. Patterson, J. C. Carver, D. E. Leyden, and D. M. Hercules,J. Phys. Chem. 80, 1702 (1976).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Suhr, H., Schmid, R. & Stürmer, W. Plasma reaction of group VI metal carbonyls. Plasma Chem Plasma Process 12, 147–159 (1992). https://doi.org/10.1007/BF01447443
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF01447443