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MINDO/3 calculation of the electronic structure of silicon nitride

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Abstract

The electronic structure of silicon nitride has been calculated by the semiempirical quantumchemical method MINDO/3 in the cluster approximation. The effect of cluster size and of boundary conditions on the partial density of one-electron states is analyzed. The results of the calculation are compared with experimental data on amorphous silicon nitride. The origin of a peak in the upper part of the valence band, which is seen in the SiL2,3 spectrum but not reproduced in the calculations is discussed.

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References

  1. V. I. Belyi, L. L. Vasilyeva, V. A. Gritsenko et al., in Silicon Nitride in Electronics (Material Science Monographs, Vol. 34), edited by A. V. Rzhanov, (North-Holland, Amsterdam, 1988), p. 555.

    Google Scholar 

  2. V. A. Gritsenko, Structure and Electronic Spectrum of Amorphous Dielectrics in Silicon MIS Structures [in Russian], Nauka, Novosibirsk (1993).

    Google Scholar 

  3. S. Fujita and S. Sasaki, J. Electrochem. Soc. 132, 398 (1985).

    Google Scholar 

  4. P. A. Pundur, Yu. G. Shavalgin, and V. A. Gritsenko, Phys. Status Solidi A 94, K107 (1986).

    Google Scholar 

  5. P. M. Lenahan, D. T. Krick, and J. Kanicki, Appl. Surf. Sci. 39, 392 (1989).

    Article  Google Scholar 

  6. J. Robertson, Philos. Mag. B 63, 47 (1991).

    Google Scholar 

  7. W. L. Warren, J. Kanicki, J. Robertson, E. H. Poindexter, and P. J. McWhorter, J. Appl. Phys. 74, 4034 (1993).

    Article  ADS  Google Scholar 

  8. V. A. Gritsenko and P. A. Pundur, Fiz. Tverd. Tela (Leningrad) 28, 3239 (1986) [Sov. Phys. Solid State 28, 1829 (1986)].

    Google Scholar 

  9. V. A. Gritsenko, E. E. Meerson, I. B. Travkov, and Yu. V. Goltvyanskii, Mikroélektronika 16, No. 1, 42 (1987).

    Google Scholar 

  10. V. A. Gritsenko, Yu. P. Kostikov, and L. V. Khramova, Fiz. Tverd. Tela (Leningrad) 34, 2424 (1992) [Sov. Phys. Solid State 34, 1300 (1992)].

    Google Scholar 

  11. R. J. Sokel, J. Phys. Chem. Solids 41, 899 (1980).

    Google Scholar 

  12. J. Robertson, Philos. Mag. B 44, 215 (1981).

    Google Scholar 

  13. S. Y. Ren and W. Y. Ching, Phys. Rev. B 23, 5454 (1981).

    ADS  Google Scholar 

  14. A. G. Petukhov, Fiz. Tverd. Tela (Leningrad) 27, 95 (1985) [Sov. Phys. Solid State 27, 55 (1985)].

    MathSciNet  Google Scholar 

  15. E. C. Ferreira and C. E. T. Gonçalves da Silva, Phys. Rev. B 32, 8332 (1985).

    Article  ADS  Google Scholar 

  16. L. Martín-Moreno, E. Martínez, J. A. Vergés, and F. Yndurain, Phys. Rev. B 35, 9683 (1987).

    Article  ADS  Google Scholar 

  17. J. Robertson, J. Appl. Phys. 54, 4490 (1983).

    Article  ADS  Google Scholar 

  18. J. Robertson, Philos. Mag. B 69, 307 (1994).

    Google Scholar 

  19. Y. Xu and W. Y. Ching, Physica B 150, 32 (1988).

    Google Scholar 

  20. E. P. Domashevskaya, Yu. K. Timoshenko, V. A. Terekhov et al., J. Non-Cryst. Solids 114, 495 (1989).

    Article  Google Scholar 

  21. R. C. Bingham, M. J. S. Dewar, and D. H. Lo, J. Am. Chem. Soc. 97, 1285 (1975).

    Google Scholar 

  22. Molecular Constants of Inorganic Compounds: a Handbook [in Russian], edited by K. S. Krasnov, Khimiya, Leningrad (1979).

    Google Scholar 

  23. V. A. Gritsenko and Yu. P. Kostikov, Fiz. Tverd. Tela (St. Petersburg) (in press).

  24. V. I. Nithianandam and S. E. Schnatterly, Phys. Rev. B 36, 1159 (1987).

    Article  ADS  Google Scholar 

  25. E. A. Repnikova, V. A. Gurtov, and Z. V. Panova, Phys. Status Solidi A 119, 113 (1990).

    Google Scholar 

  26. K. Wakita, F. Makimura, and Y. Nakayama, J. Appl. Phys. 34, 1425 (1995).

    Google Scholar 

  27. A. H. Edwards and W. B. Fowler, J. Phys. Chem. Solids 46, 841 (1985).

    Google Scholar 

  28. V. A. Gritsenko, R. M. Ivanov, and Yu. N. Morokov, Zh. Éksp. Teor. Fiz. 108, 2216 (1995) [Sov. Phys. JETP 81, 1208 (1995)].

    Google Scholar 

  29. R. D. Carson and S. E. Schnatterly, Phys. Rev. B 33, 2432 (1986).

    Article  ADS  Google Scholar 

  30. I. A. Brytov, V. A. Gritsenko, Yu. P. Kostikov, E. A. Obolenskii, and Yu. N. Romashchenko, Fiz. Tverd. Tela (Leningrad) 26, 1685 (1984) [Sov. Phys. Solid State 26, 1022 (1984)].

    Google Scholar 

  31. I. A. Brytov, E. A. Obolenskii, Yu. N. Romashenko, and V. A. Gritsenko, J. Phys. (Paris) 45, C2–888 (1984).

    Google Scholar 

  32. I. A. Brytov, V. A. Gritsenko, and Yu. N. Romashchenko, Zh. Éksp. Teor. Fiz. 89, 562 (1985) [Sov. Phys. JETP 62, 321 (1985)].

    ADS  Google Scholar 

  33. J. R. Chelikowski and M. Schluter, Phys. Rev. B 15, 4020 (1977).

    ADS  Google Scholar 

  34. R. N. Nucho and A. Madhukar, Phys. Rev. B 21, 1576 (1980).

    Article  ADS  Google Scholar 

  35. D. Lohez and M. Lannoo, Phys. Rev. B 27, 5007 (1983).

    Article  ADS  Google Scholar 

  36. R. P. Gupta, Phys. Rev. B 32, 8278 (1985).

    Article  ADS  Google Scholar 

  37. R. Hezel, Radiat. Eff. 65, 101 (1982).

    Google Scholar 

  38. V. A. Terekhov, N. M. Medvedev, V. M. Andreeshchev, V. M. Kashkarov, and É. P. Domashevskaya, Poverkhnost’ No. 6, 91 (1984).

  39. D. L. Griscom, J. Non-Cryst. Solids 24, 155 (1977).

    Article  Google Scholar 

  40. A. J. Bennett and L. M. Roth, J. Phys. Chem. Solids 32, 1251 (1971).

    Google Scholar 

  41. A. Simunek and G. Weich, J. Non-Cryst. Solids 137/138, 903 (1991).

    Article  Google Scholar 

  42. I. Tanaka, J. Kawai, and H. Adachi, Phys. Rev. B 52, 11733 (1995).

  43. J. J. Yeh and I. Lindau, Atomic Data-Nuclear Data Tables 32, 1 (1985).

    ADS  Google Scholar 

  44. G. K. Wertheim, in Electron and Ion Spectroscopy of Solids, edited by L. Fiermans, J. Vennik, and W. Dekeyser, Plenum Press, New York (1978), p. 195.

    Google Scholar 

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Fiz. Tverd. Tela (St. Petersburg) 39, 1342–1347 (August 1997)

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Gritsenko, V.A., Novikov, Y.N. & Morokov, Y.N. MINDO/3 calculation of the electronic structure of silicon nitride. Phys. Solid State 39, 1191–1196 (1997). https://doi.org/10.1134/1.1130131

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  • DOI: https://doi.org/10.1134/1.1130131

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