Abstract
Ar+ induced Auger electrons from Si and Ar were investigated at bombardment energies between 3–15 keV and target currents of a few μA. The Auger electron yields were compared with secondary ion yields of Si and Ar by simultaneous SIMS-AES measurements. In the ion induced Auger spectra of Si five Auger peaks and in the Ar spectra three Auger peaks were observed. The ion induced Auger electron yield of Si and Ar were found to be strongly dependent upon the primary ion energy. “Bulk like” and “atomic like” Auger transitions of ion induced Auger electrons of Si were observed.
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References
M. Kaminsky:Atomic and Ionic Impact Phenomena on Metal Surfaces (Springer, Berlin, Heidelberg 1965)
G. Carter, J.S. Colligon:Ion Bombardment of Solids (Heinemann Educational Books, London 1968)
J.S. Colligon: Vacuum24, 373 (1974)
H.D. Hagstrum: Phys. Rev.24, 1122 (1953)
R. Castaing, J.F. Hennequin: Advan. Mass. Spectrom.5, 419 (1971)
L. Viel, C. Benarzeth, N. Benarzeth: Surface Sci.54, 635 (1976)
C. Benarzeth, L. Viel, N. Colombie: C.R. Acad. Sc. (Paris)276B, 863 (1973)
J.F. Hennequin, P. Viaris de Lesegno: Surface Sci.42, 50 (1974)
T.W. Haas, R.W. Springer, M.P. Hooker, J.T. Grant: Physics Lett.47A, 317 (1974)
J.T. Grant, M.P. Hooker, R.W. Springer, T.W. Haas: J. Vac. Sci. Technol.12, 1 (1975)
J. Ferrante, S.V. Pepper: Surface Sci.57, 420 (1976)
U. Fano, W. Lichten: Phys. Rev. Lett.14, 627 (1965)
M. Barat, W. Lichten: Phys. Rev. A6, 211 (1972)
P. Joyes: Rad. Effects19, 235 (1973)
J. Maul, K. Wittmaack: Surface Sci.47, 358 (1975)
K. Wittmaack, J. Maul, F. Schulz: In Proc. Sixth Int. Conf. Electron and Ion Beam Science and Technology, ed. by R. Bakish (The Electrochemical Soc, Princeton 1974), p. 164
Advances in Solid State Physics, Festkörperprobleme. Vol. XIII (Pergamon Vieweg, Braunschweig 1973), p. 271
F.W. Saris, D. Onderdelinden: Physica49, 441 (1970)
F. Schulz, K. Wittmaack: Rad. Effects29, 31 (1976)
H. Sommerfeldt, E.S. Mashkova, V.A. Molchanov: Phys. Lett.38A, 237 (1972)
P. Blank, K.W. Wittmaack, F. Schulz: Nucl. Instr. Meth.132, 387 (1976)
K.O. Groeneveld, R. Mann, W. Meckbach, R. Spohr: Vacuum25, 1 (1974)
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Kempf, J., Kaus, G. 3 to 15 keV Ar+ induced Auger electron emission from Si and Ar. Appl. Phys. 13, 261–266 (1977). https://doi.org/10.1007/BF00882890
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DOI: https://doi.org/10.1007/BF00882890