Abstract
In the usual thickness range of sputtered metallic films, analytical linearized approximate expressions of polycrystalline film resistivity and its t.c.r. are deduced from the Mayadas-Shatzkes theoretical equations. A good experimental fit is observed for Al rf sputtered metal films.
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Tellier, C.R., Tosser, A.J. Analytical approximate equations for the resistivity and its temperature coefficient in thin polycrystalline metallic films. Appl. Phys. 14, 221–224 (1977). https://doi.org/10.1007/BF00883093
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DOI: https://doi.org/10.1007/BF00883093