Abstract
Four different measurement techniques: EPR, NAA, DLTS, and luminescence were applied to characterize the properties of chromium in silicon. The solubility of chromium in silicon was determined and its pairing reaction with boron was studied. The energy level atE c−0.23 eV was attributed to interstitial chromium and a second level atE v+0.27 eV was correlated to chromium-boron pairs. The luminescence band of the chromium-boron pairs was clearly identified. The properties of chromium are compared with those of other transition metal impurities in silicon crystals.
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