Abstract
Ti diffusion into LiNbO3 single crystal was studied as a result of Ruby laser irradiation of a metallic Ti thin film covering the crystal surface and subsequent thermal processing in a furnace. Different regimes of irradiation and heating were used. SIMS analysis was employed for investigation of the treatment. The combined method used proved to be able to form waveguides of 3–4 μm thickness.
Similar content being viewed by others
References
R.V. Schmidt, I.P. Kaminov: Appl. Phys. Lett. 25, 458 (1974)
D.C. Cromer, G.N. De Branbander, J.T. Boyd, H.E. Jackson, S. Sziram: Appl. Opt. 28, 33 (1989)
W.K. Burns, P.H. Klein: J. Appl. Opt. 50, 6175 (1979)
M. Fukuma, J. Noda: Appl. Opt. 19, 591 (1980)
V.P. Kalinushkin, A.A. Manenkov, G.N. Mikhailova, M.G. Ploppa, A.M. Prokhorov, A.S. Seferov, Y.N. Chekhonadski, I.B. Khaibullin: Microelectronics 15, (6), 528 (1986) (Sov. Journ.)
M. Bertolotti, M. Rossi, A. Ferrari, V. Craciun, I.N. Mihailescu, G.N. Mikhailova, Anurada Dhaul, R. Chander, I. Ursu: J. Appl. Phys. 71, 5888 (1992)
W.H. Christie, R.E. Eby, R.L. Anderson, T.G. Kollie: Appl. Surf. Sci. 3, 329 (1979)
H.H. Andersen: J. Appl. Phys., 131 (1979)
R. Behrisch (Ed.): Sputtering by Particle Bombardment I, Topics App. Phys., Vol. 47 (Springer, Berlin, Heidelberg 1981)
K. Sunoyama, T. Suruk, Y. Okashi, H. Krishidaka: Surface Interface Analysis 2, 212 (1980)
M.N. Armenise, C. Canali, M. de Sario, P. Mazzoldi: J. Non-Cryst. Sol. 47, 255 (1982)