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Pulsed laser crystallization of hydrogen-free a-Si thin films for high-mobility poly-Si TFT fabrication

  • Surfaces And Muitilayers
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Abstract

The possibility to fabricate high-mobility polysilicon TFTs by nanosecond pulsed laser crystallization of unhydrogenated amorphous Si thin films has been investigated. Two types of lasers have been used: a large area (≈ 1 cm2) single ArF excimer laser pulse and a small diameter (≈ 100 μm) frequency-doubled Nd:YAG laser beam, working in the scanning regime. Processed films have been characterized in detail by different optical and microscopic techniques. Device performances indicate that the best results are achieved with the excimer laser leading to high mobility values (up to 140 cm2/Vs) which are much larger than in polysilicon TFTs fabricated onto the same quartz substrates by low-temperature thermal (630° C) crystallization of amorphous Si films (μfe≈55 cm2/Vs).

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References

  1. H.W. Lam, M.J. Thompson (eds.): Comparison of Thin-Film Transistors and SOI Technologies, Mater. Res. Soc. Symp. Proc. Vol. 33, (North-Holland, New York 1984)

    Google Scholar 

  2. A. Chiang, M.W. Geis, L. Pfeiffer (eds.) Semiconductor-on-Insulator and Thin-Film Transistor Technology, Mater. Res. Soc. Symp. Proc. Vol. 53, (Materials Research Society, Pittsburgh 1986)

    Google Scholar 

  3. K. Kobayashi, J. Nijs, R. Mertens: J. Appl. Phys. 65, 2541 (1989)

    Google Scholar 

  4. A. Mimura, N. Konishi, K. Ono, J. Ohwada, Y. Hosokawa, Y. Ono, T. Suzuki, K. Miyata, H. Kawakami: IEEE Trans. ED-36, 351 (1989)

    Google Scholar 

  5. T. Nishimura, A. Ishizu, T. Matsumoto, Y. Akasaka: [1], p. 221

    Google Scholar 

  6. T. Unagami, O. Kogure: IEEE Trans. ED-35, 314 (1988)

    Google Scholar 

  7. T. Serikawa, S. Shirai, A. Okamoto, S. Suyama: IEEE Trans. ED-36, 1929 (1989)

    Google Scholar 

  8. T. Sameshima, M. Hara, S. Usui: Jpn. J. Appl. Phys. 28, 1789 (1989)

    Google Scholar 

  9. K. Sera, F. Okumura, H. Uchida, S. Itoh, S. Kaneko K. Hotta: IEEE Trans. ED-36, 2868 (1989)

    Google Scholar 

  10. R.Z. Bachrach, K. Winer, J.B. Boyce, S.E. Ready, R.I. Johnson, G.B. Anderson: J. Electron. Mater. 19, 241 (1990)

    Google Scholar 

  11. K. Winer, R.Z. Bachrach, R.I. Johnson, S.E. Ready, G.B. Anderson, J.B. Boyce: In Materials Issues in Microcrystalline Semiconductors, ed. by P.M. Fauchet, K. Tanaka, C.C. Tsai, Mater. Res. Soc. Symp. Proc., Vol. 164 (Materials Research Society, Pittsburgh 1990) p. 183

    Google Scholar 

  12. M. Elliq, E. Fogarassy, J.P. Stoquert, C. Fuchs, S. de Unamuno, B. Prevot, H. Pattyn: Appl. Surf. Sci. 46, 378 (1990)

    Google Scholar 

  13. E.L. Mathé, A. Naudon, M. Elliq, E. Fogarassy, S. de Unamuno: Appl. Surf. Sci. 54, 392 (1992)

    Google Scholar 

  14. A. Naudon, J.C. Desoyer, E. Fogarassy, J. Maillou, E.L. Mathé, T. Slimani: Photon, Beam and Plasma Enhanced Processing, ed. by V.T. Nguyen, E.F. Krimmel, A. Golanski, European Mat. Res. Soc. Symp. Proc., Vol. XV (Les Editions de Physique, Les Ulis 1987) p. 309

    Google Scholar 

  15. B. Prévot, J. Wagner: Prog. Crystal Growth and Charact. 22, 245 (1991)

    Google Scholar 

  16. P.M. Fauchet, I.H. Campbell: CRC Crit. Rev. Solid State Mater. Sci. 14, Suppl. 1, S79 (1988)

  17. G. Harbeke, L. Krausbauer, E.F. Steigmeier, A.E. Widmer, H.F. Kapport, G. Neugebauer: J. Electrochem. Soc. 131, 675 (1984)

    Google Scholar 

  18. G. Harbeke: Polycrystalline Semiconductors, ed. by G. Harbeke, Springer Ser. Solid State Sci., Vol. 57 (Springer, Berlin, Heidelberg 1985) p. 156

    Google Scholar 

  19. S. de Unamuno, E. Fogarassy: Appl. Surf. Sci. 36, 1 (1989)

    Google Scholar 

  20. H. Pattyn, K. Baert, P. Debenest, M. Heyns, M. Schaikers, J. Nijs, R. Mertens: Extended Abstracts of the 22nd Conf. on Solid State Devices and Materials, Sendai (1990) p. 959

  21. J. Gonzalez-Hernandez, G.H. Azabayejani, R. Tsu, F.H. Pollak: Appl. Phys. Lett. 47, 1350 (1985)

    Google Scholar 

  22. H.J. Leamy, G.A. Rozgonyi, T.T. Sheng, G.K. Celler: Appl. Phys. Lett. 32 (9), 535 (1978)

    Google Scholar 

  23. R.Z. Bachrach, J.B. Boyce, S.E. Ready, G.B. Anderson: Polycrystalline Semiconductors II, ed. by J.H. Werner, H.P. Strunk, Springer Proc. Phys., Vol. 54 (Springer Berlin, Heidelberg 1991), p. 330

    Google Scholar 

  24. H. Kuriyama, S. Kiyama, S. Noguchi, T. Kuwahara, S. Ishida, T. Nohda, K. Sano, H. Iwata, H. Kwata, M. Osumi, S. Tsuda, S. Nakano, Y. Kuwana: Jpn. J. Appl. Phys. 30, B3700 (1991)

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Authors and Affiliations

  1. Laboratoire PHASE (UPR du CNRS n°292), Centre de Recherches Nucleaires (IN2P3), B.P. 20, F-67037, Strasbourg Cedex 2, France

    E. Fogarassy, B. Prevot, S. De Unamuno & M. Elliq

  2. IMEC, Kapeldreef 75, B-3030, Leuven, Belgium

    H. Pattyn

  3. Laboratoire de Métallurgie Physique, (URA 131 du CNRS), 40, avenue du Recteur Pineau, F-86022, Poitiers Cedex, France

    E. L. Mathe & A. Naudon

Authors
  1. E. Fogarassy
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  2. B. Prevot
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  3. S. De Unamuno
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  4. M. Elliq
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  5. H. Pattyn
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  6. E. L. Mathe
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  7. A. Naudon
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Fogarassy, E., Prevot, B., De Unamuno, S. et al. Pulsed laser crystallization of hydrogen-free a-Si thin films for high-mobility poly-Si TFT fabrication. Appl. Phys. A 56, 365–373 (1993). https://doi.org/10.1007/BF00324357

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  • DOI: https://doi.org/10.1007/BF00324357

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