Abstract
The intensity dependence of the total and specific yields of positive ions desorbed from SrF2 under 193 nm and 308 nm excimer-laser irradiation has been investigated by the time-of-flight method. The following positive ion species have been detected: F+, Sr+, Sr++, SrF++ and SrF +2 . The Sr+ and SrF+ emission yields are found to increase as E n, where E represents the laser energy per pulse. The exponent n is related to defect-initiated neutral particle emission and gas-phase ionization. The influence of surface damage on this power dependence is investigated. The F+ emission yield showed a quite different behaviour compared to that of the Sr+ and SrF+ emission. At both wavelengths the total positive ion emission yields saturate at a certain laser energy. In the saturation regime the SrF+ emission vanishes and alternative emission of F+ and Sr+ was observed at both wavelengths, but the total emission yield in the saturation regime (F+ + Sr+) remained constant. A Scanning Electron Microscope (SEM) was used to investigate the damage spots after laser irradiation for thermal effects.
Similar content being viewed by others
References
A.J. Glass, A.H. Günther: Appl. Opt. 12, 637 (1973)
V. Nathan, A.H. Günther, S.S. Mitra: J. Opt. Soc. Am. B 294, 294 (1985)
J. Reif, S. Petzoldt, A.P. Elg, E. Matthias: Appl. Phys A 49, 199 (1989)
Y. Nakai, K. Hattori, A. Okano, N. Itoh, R.F. Haglund, Jr.: Nucl. Instrum. Methods B 58, 452 (1991)
Y. Nakai, K. Hattori, A. Okano, T. Taguchi, J. Kanasaki, N. Itoh: Surf. Sci. 283, 169 (1993)
P.D. Townsend, R. Browning, D.J. Garlant, J.C. Kelly, A. Mahjoobi, A.J. Michael, M. Saidoh: Radiat. Eff. 30, 55 (1976)
N. Itoh: J. Phys. C 7, 27 (1976)
R.T. Williams, K.S. Song, W.L. Faust, C.H. Leung: Phys. Rev. B 33, 7232 (1986)
T.R. Pian, M.M. Traum, J.S. Kraus, N.H. Tolk, N.G. Stoffel, G. Margaritondo: Surf. Sci. 128 13 (1983)
M. Szymonksy, J. Ruthowski, A. Poradzisz, Z. Postawa, B. Jörgensen: In Desorption Induced by Electronic Transitions DIET II, ed. by W. Brenig, D. Menzel, Springer Ser. Surf. Sci., Vol. 4 (Springer, Berlin, Heidelberg 1984) p. 160
T. Yasue, A. Ichimiya: Surf. Sci. 186, 191 (1987)
M.L. Knotek: Rep. Progr. Phys. 47, 1499 (1984)
P. Williams, G. Gillen: Surf. Sci. 180 (1987)
Z. Wu: Phys. Lett. A 131, 486 (1988)
N. Itoh, T. Nakayama: Phys. Lett. A 92, 471 (1982)
A. Okano, A.Y. Matsuura, K. Hattori, N. Ioth: J. Appl. Phys. 73, 3158 (1993)
G.D. Mahan, H.S. Cole, Y.S. Liu, H.R. Philipp: Appl. Phys. Lett. 53, 2377 (1988)
B.J. Garrison, R. Srinivasan: J. Appl. Phys. 57, 2909 (1985)
E. Sutcliffe, R. Srinivasan: J. Appl. Phys. 60, 3315 (1986)
L.B. Kiss, P. Simon: Solid State Commun. 65, 1253 (1988)
Yu.P. Raizer: Sov. Phys. Uspekhi 8, 650 (1966)
H. Cronberg, M. Reichling, E. Broberg, H.B. Nielsen, E. Matthias, N. Tolk: Appl. Phys. B 52, 1 (1991)
N. Bloembergen: IEEE J. QE-10, 375 (1974)
W. Lee Smith, J.H. Bechtel, N. Bloembergen: Phys. Rev. B 15, 4039 (1977)
R.W. Dreyfus, R.E. Walkup, R. Kelly: Radiat. Eff. 99, 683 (1986)
R.C. Estler, E.C. Apel, N.S. Nogar: J. Opt. Soc. Am. B 4, 281 (1987)
R. Kelly, J.J. Cuomo, P.A. Leary, J.E. Rothenberg, B.E. Braren, C.F. Aliotta: Nucl. Instrum. Methods B 9, 329 (1985)
E. Matthias, T.A. Green: In: Desorption Induced by Electronic Transitions DIET IV, ed. by G. Betz, P. Varga, Springer Ser. Surf. Sci., Vol. 19 (Springer, Berlin, Heidelberg 1990) p. 112
R.W. Dreyfus: Surf. Sci. 283, 177 (1993)
L. Chen, V. Liberman, J.A. O'Neill, Z. Wu, R.M. Osgood, Jr.: J. Vac. Sci. Technol. A 6, 1426 (1988)
R.E. Walkup, Ph. Avouris, A.P. Ghosh: In Desorption Induced by Electronic Transitions DIET III, ed. by R.H. Stulen, M.L. Knotek, Springer Ser. Surf. Sci., Vol. 13 (Springer, Berlin, Heidelberg 1987) p. 248
M. Szymonski, H. Overeijnder, A.E. De Vries: Surf. Sci. 90, 274 (1979)
H. Cronberg, M. Reichling, E Broberg, H.B. Nielsen, E. Matthias, N.H. Tolk: Appl. Phys. B 52, 155 (1991)
O. Kreitschitz, Ch. Polster, W. Husinsky, G. Betz: Nucl. Instrum. Methods B 58, 490 (1991)
N. Seifert, W. Husinsky, G. Betz: Phys. Rev. B 43, 6723 (1991)
A. Schmid, P. Bräunlich, P.K. Rol: Phys. Rev. Lett. 35, 1382 (1975)
J.T. Dickinson, M.J. Dresser, L.C. Jensen: In Desorption Induced by Electronic Transitions DIET II, ed. by W. Brenig, D. Menzel, Springer Ser. Surf. Sci., Vol. 4 (Springer, Berlin, Heidelberg 1985) p. 281
D. Menzel: Nucl. Instrum. Methods B 13, 507 (1986)
C.R. Phipps, Jr., T.P. Turner, R.F. Harrison, G.W. York, W.Z. Osborne, G.K. Anderson, X.F. Corlis, L.C. Haynes, H.S. Steele, K.C. Spicochi, T.R. King: J. Appl. Phys. 64, 1083 (1988)
J.J. O'Dwyer: The Theory of Dielectric Breakdown of Solids (Clarendon, Oxford 1964)
O. Kreitschitz, W. Husinsky, G. Betz: In Desorption Induced by Electronic Transitions DIET V, ed. by A.R. Burns, E.B. Stechel, D.R. Jennison, Springer Ser. Surf. Sci., Vol. 31 (Springer, Berlin, Heidelberg 1993) p. 81
J. Reif, H. Fallgren, H.B. Nielsen, E. Matthias: Appl. Phys. Lett. 49, 930 (1986)
M. Sparks, D.L. Mills, R. Warren, T. Holstein, A.A. Maradudin, L.J. Sham, E. Loh, Jr., D.F. King: Phys. Rev. B 24, 3519 (1981)
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Kreitschitz, O., Husinsky, W., Betz, G. et al. Time-of-flight investigation of the intensity dependence of laser-desorbed positive ions from SrF2 . Appl. Phys. A 58, 563–571 (1994). https://doi.org/10.1007/BF00348167
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF00348167