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Time-of-flight investigation of the intensity dependence of laser-desorbed positive ions from SrF2

  • Surfaces and Multilayers
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Abstract

The intensity dependence of the total and specific yields of positive ions desorbed from SrF2 under 193 nm and 308 nm excimer-laser irradiation has been investigated by the time-of-flight method. The following positive ion species have been detected: F+, Sr+, Sr++, SrF++ and SrF +2 . The Sr+ and SrF+ emission yields are found to increase as E n, where E represents the laser energy per pulse. The exponent n is related to defect-initiated neutral particle emission and gas-phase ionization. The influence of surface damage on this power dependence is investigated. The F+ emission yield showed a quite different behaviour compared to that of the Sr+ and SrF+ emission. At both wavelengths the total positive ion emission yields saturate at a certain laser energy. In the saturation regime the SrF+ emission vanishes and alternative emission of F+ and Sr+ was observed at both wavelengths, but the total emission yield in the saturation regime (F+ + Sr+) remained constant. A Scanning Electron Microscope (SEM) was used to investigate the damage spots after laser irradiation for thermal effects.

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References

  1. A.J. Glass, A.H. Günther: Appl. Opt. 12, 637 (1973)

    Google Scholar 

  2. V. Nathan, A.H. Günther, S.S. Mitra: J. Opt. Soc. Am. B 294, 294 (1985)

    Google Scholar 

  3. J. Reif, S. Petzoldt, A.P. Elg, E. Matthias: Appl. Phys A 49, 199 (1989)

    Google Scholar 

  4. Y. Nakai, K. Hattori, A. Okano, N. Itoh, R.F. Haglund, Jr.: Nucl. Instrum. Methods B 58, 452 (1991)

    Google Scholar 

  5. Y. Nakai, K. Hattori, A. Okano, T. Taguchi, J. Kanasaki, N. Itoh: Surf. Sci. 283, 169 (1993)

    Google Scholar 

  6. P.D. Townsend, R. Browning, D.J. Garlant, J.C. Kelly, A. Mahjoobi, A.J. Michael, M. Saidoh: Radiat. Eff. 30, 55 (1976)

    Google Scholar 

  7. N. Itoh: J. Phys. C 7, 27 (1976)

    Google Scholar 

  8. R.T. Williams, K.S. Song, W.L. Faust, C.H. Leung: Phys. Rev. B 33, 7232 (1986)

    Google Scholar 

  9. T.R. Pian, M.M. Traum, J.S. Kraus, N.H. Tolk, N.G. Stoffel, G. Margaritondo: Surf. Sci. 128 13 (1983)

    Google Scholar 

  10. M. Szymonksy, J. Ruthowski, A. Poradzisz, Z. Postawa, B. Jörgensen: In Desorption Induced by Electronic Transitions DIET II, ed. by W. Brenig, D. Menzel, Springer Ser. Surf. Sci., Vol. 4 (Springer, Berlin, Heidelberg 1984) p. 160

    Google Scholar 

  11. T. Yasue, A. Ichimiya: Surf. Sci. 186, 191 (1987)

    Google Scholar 

  12. M.L. Knotek: Rep. Progr. Phys. 47, 1499 (1984)

    Google Scholar 

  13. P. Williams, G. Gillen: Surf. Sci. 180 (1987)

  14. Z. Wu: Phys. Lett. A 131, 486 (1988)

    Google Scholar 

  15. N. Itoh, T. Nakayama: Phys. Lett. A 92, 471 (1982)

    Google Scholar 

  16. A. Okano, A.Y. Matsuura, K. Hattori, N. Ioth: J. Appl. Phys. 73, 3158 (1993)

    Google Scholar 

  17. G.D. Mahan, H.S. Cole, Y.S. Liu, H.R. Philipp: Appl. Phys. Lett. 53, 2377 (1988)

    Google Scholar 

  18. B.J. Garrison, R. Srinivasan: J. Appl. Phys. 57, 2909 (1985)

    Google Scholar 

  19. E. Sutcliffe, R. Srinivasan: J. Appl. Phys. 60, 3315 (1986)

    Google Scholar 

  20. L.B. Kiss, P. Simon: Solid State Commun. 65, 1253 (1988)

    Google Scholar 

  21. Yu.P. Raizer: Sov. Phys. Uspekhi 8, 650 (1966)

    Google Scholar 

  22. H. Cronberg, M. Reichling, E. Broberg, H.B. Nielsen, E. Matthias, N. Tolk: Appl. Phys. B 52, 1 (1991)

    Google Scholar 

  23. N. Bloembergen: IEEE J. QE-10, 375 (1974)

    Google Scholar 

  24. W. Lee Smith, J.H. Bechtel, N. Bloembergen: Phys. Rev. B 15, 4039 (1977)

    Google Scholar 

  25. R.W. Dreyfus, R.E. Walkup, R. Kelly: Radiat. Eff. 99, 683 (1986)

    Google Scholar 

  26. R.C. Estler, E.C. Apel, N.S. Nogar: J. Opt. Soc. Am. B 4, 281 (1987)

    Google Scholar 

  27. R. Kelly, J.J. Cuomo, P.A. Leary, J.E. Rothenberg, B.E. Braren, C.F. Aliotta: Nucl. Instrum. Methods B 9, 329 (1985)

    Google Scholar 

  28. E. Matthias, T.A. Green: In: Desorption Induced by Electronic Transitions DIET IV, ed. by G. Betz, P. Varga, Springer Ser. Surf. Sci., Vol. 19 (Springer, Berlin, Heidelberg 1990) p. 112

    Google Scholar 

  29. R.W. Dreyfus: Surf. Sci. 283, 177 (1993)

    Google Scholar 

  30. L. Chen, V. Liberman, J.A. O'Neill, Z. Wu, R.M. Osgood, Jr.: J. Vac. Sci. Technol. A 6, 1426 (1988)

    Google Scholar 

  31. R.E. Walkup, Ph. Avouris, A.P. Ghosh: In Desorption Induced by Electronic Transitions DIET III, ed. by R.H. Stulen, M.L. Knotek, Springer Ser. Surf. Sci., Vol. 13 (Springer, Berlin, Heidelberg 1987) p. 248

    Google Scholar 

  32. M. Szymonski, H. Overeijnder, A.E. De Vries: Surf. Sci. 90, 274 (1979)

    Google Scholar 

  33. H. Cronberg, M. Reichling, E Broberg, H.B. Nielsen, E. Matthias, N.H. Tolk: Appl. Phys. B 52, 155 (1991)

    Google Scholar 

  34. O. Kreitschitz, Ch. Polster, W. Husinsky, G. Betz: Nucl. Instrum. Methods B 58, 490 (1991)

    Google Scholar 

  35. N. Seifert, W. Husinsky, G. Betz: Phys. Rev. B 43, 6723 (1991)

    Google Scholar 

  36. A. Schmid, P. Bräunlich, P.K. Rol: Phys. Rev. Lett. 35, 1382 (1975)

    Google Scholar 

  37. J.T. Dickinson, M.J. Dresser, L.C. Jensen: In Desorption Induced by Electronic Transitions DIET II, ed. by W. Brenig, D. Menzel, Springer Ser. Surf. Sci., Vol. 4 (Springer, Berlin, Heidelberg 1985) p. 281

    Google Scholar 

  38. D. Menzel: Nucl. Instrum. Methods B 13, 507 (1986)

    Google Scholar 

  39. C.R. Phipps, Jr., T.P. Turner, R.F. Harrison, G.W. York, W.Z. Osborne, G.K. Anderson, X.F. Corlis, L.C. Haynes, H.S. Steele, K.C. Spicochi, T.R. King: J. Appl. Phys. 64, 1083 (1988)

    Google Scholar 

  40. J.J. O'Dwyer: The Theory of Dielectric Breakdown of Solids (Clarendon, Oxford 1964)

    Google Scholar 

  41. O. Kreitschitz, W. Husinsky, G. Betz: In Desorption Induced by Electronic Transitions DIET V, ed. by A.R. Burns, E.B. Stechel, D.R. Jennison, Springer Ser. Surf. Sci., Vol. 31 (Springer, Berlin, Heidelberg 1993) p. 81

    Google Scholar 

  42. J. Reif, H. Fallgren, H.B. Nielsen, E. Matthias: Appl. Phys. Lett. 49, 930 (1986)

    Google Scholar 

  43. M. Sparks, D.L. Mills, R. Warren, T. Holstein, A.A. Maradudin, L.J. Sham, E. Loh, Jr., D.F. King: Phys. Rev. B 24, 3519 (1981)

    Google Scholar 

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Kreitschitz, O., Husinsky, W., Betz, G. et al. Time-of-flight investigation of the intensity dependence of laser-desorbed positive ions from SrF2 . Appl. Phys. A 58, 563–571 (1994). https://doi.org/10.1007/BF00348167

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