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XeCl-laser-generated ablation products from a nitrogen-rich polymer studied by laser-ionization mass spectrometry

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Abstract

Laser-ionization time-of-flight mass spectrometry has been used to probe laser-ablation products from a nitrogen-rich polymer at a wavelength of 308 nm. The ablation products at a laser fluence of 150 mJ/cm2 showed, similar to 532 nm ablation studied previously [18], two strong peaks due to neutral species that were assigned to C+ and CN+, as well as several weak peaks that were assigned to CH+, HCN+, HCNH+, HnN−CN+ (n=1–3), and H2N−C=N−CN+ or H2N−C=N−CN+. The ablation products at 870 mJ/cm2 revealed, in addition to a broad signal due to ionic products generated directly by the ablation laser, several peaks due to neutral products that were assigned to C+, C +2 , C +3 , CN+, HCN+, HCNH+, and NCCN+. The most probable flight velocities for major neutral products are 5.7×104 cm/s at 150 mJ/cm2 and 2.3–2.7×104 cm/s at 870 mJ/cm2. The results at a laser fluence of 150 mJ/cm2 support the finding that the translational energy of the tragments has importance for the collision-induced product generation in the laser plume, as suggested earlier [18]. Furthermore, the product generation at 870 mJ/cm2 is interpreted by the ejection of small neutral and ionic fragments, and subsequent reactions among the fragments.

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References

  1. B. Danielzik, N. Fabricius, M. Rowekamp, D. von der Lide: Appl. Phys. Lett.48, 212 (1986)

    Google Scholar 

  2. R.C. Estler, N.S. Nogar. Appl. Phys. Lett.49, 1175 (1986)

    Google Scholar 

  3. R.C. Estler, N.S. Nogar: J. Vac. Sci. Technol. B5, 1465 (1987)

    Google Scholar 

  4. D. Feldmann, J. Kutzner, J. Laukemper, S. MacRobert, K.W. Welge: Appl. Phys. B44, 81 (1987)

    Google Scholar 

  5. R. Larciprete, M. Stuke: Appl. Phys. B42, 181 (1987)

    Google Scholar 

  6. S.G. Hansen: J. Appl. Phys.66, 1411 (1989)

    Google Scholar 

  7. S.G. Hansen: J. Appl. Phys.66, 3329 (1989)

    Google Scholar 

  8. S.G. Hansen: J. Appl. Phys.68, 1878 (1990)

    Google Scholar 

  9. C.E. Otis: Appl. Phys. B49, 455 (1989)

    Google Scholar 

  10. W.R. Creasy, J.T. Brenna: Chem. Phys.126, 453 (1988)

    Google Scholar 

  11. W.R. Creasy, J.T. Brenna: J. Chem. Phys.92, 2269 (1990)

    Google Scholar 

  12. E.E.B. Campbell, G. Ulmer, K. Bues, I.V. Hertel: Appl. Phys. A48, 543 (1989)

    Google Scholar 

  13. E.E.B. Campbell, G. Ulmer, B. Hasselberger, I.V. Hertel: Appl. Surf. Sci.43, 346 (1989)

    Google Scholar 

  14. E.E.B. Campbell, G. Ulmer, B. Hasselberger, H.-G., Busmann, I.V. Hertel: J. Chem. Phys.93, 6900 (1990)

    Google Scholar 

  15. G. Ulmer, B. Hasselberger, H.-G. Busmann, E.E.B. Campbell: Appl. Surf. Sci.46, 272 (1990)

    Google Scholar 

  16. N. Zhang, Z. Yu, X. Wu, Z. Gao, Q. Zhu, F. Kong: Chem. Phys. Lett.205, 178 (1993)

    Google Scholar 

  17. G.B. Blanchet, C.R. Flincher, Jr., C.L. Jackson, S.I. Shah, K.H. Gardner: Science262, 719 (1993)

    Google Scholar 

  18. F. Kokai, Y. Koga, Y. Kakudate, M. Kawaguchi, S. Fujiwara, M. Kubota, K. Fukuda: Appl. Phys. A59, 299 (1994)

    Google Scholar 

  19. F. Kokai, K. Amano, H. Ota, F. Umemura: Appl. Phys. A54, 340 (1992)

    Google Scholar 

  20. R. Kelly, R.W. Dreyfus: Surf. Sci.198, 263 (1988)

    Google Scholar 

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Kokai, F., Kakudate, Y., Togashi, H. et al. XeCl-laser-generated ablation products from a nitrogen-rich polymer studied by laser-ionization mass spectrometry. Appl. Phys. A 60, 31–34 (1995). https://doi.org/10.1007/BF01577609

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