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Received: 6 January 1997/Accepted: 8 July 1997
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Sánchez, F., Morenza, J., Aguiar, R. et al. Dynamics of the hydrodynamical growth of columns on silicon exposed to ArF excimer-laser irradiation . Appl Phys A 66, 83–86 (1998). https://doi.org/10.1007/s003390050641
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DOI: https://doi.org/10.1007/s003390050641