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atoms/cm2. In this study, in order to achieve an elementary analysis of each atom on the Si surface, metal atoms on the Si(001) surface are analyzed by STS and the result is evaluated with the first principles calculations of quantum mechanics. As metallic contaminations, sub-monolayer of Aluminum is evaporated on Si(001)2×1. The Local Density of State (LDOS) on the Al/Si(001)2×1 is measured by STS at room temperature. The measured LDOS at an Al dimer is in good agreement with that obtained from the calculation.
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Received: 25 July 1997/Accepted: 1 October 1997
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Endo, K., Arima, K., Kataoka, T. et al. STM/STS and the first principles calculations on Al/Si(001)2×1 . Appl Phys A 66 (Suppl 1), S145–S148 (1998). https://doi.org/10.1007/s003390051118
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DOI: https://doi.org/10.1007/s003390051118