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Continuous operation up to 3 kHz in a discharge-pumped XeCl excimer laser

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Abstract

Continuous operations at a high repetition rate up to 3 kHz for discharge-pumped XeCl excimer laser are presented. The dependence of the clearing ratio on laser-gas pressure and input energy densities is studied. It was found that suitable laser-gas pressures minimize the clearing ratio for various input-energy densities. It is also shown that few density disturbances in the discharge region are induced by gas heating in a discharge-pumped XeCl excimer laser with low input-energy density

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Authors and Affiliations

  1. Opto-Electronics Research Laboratories, NEC Corporation, 1-1, Miyazaki, 4-chome, 216, Miyamae-ku, Kawasaki, Kanagawa, Japan

    S. Ito

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  1. S. Ito
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Ito, S. Continuous operation up to 3 kHz in a discharge-pumped XeCl excimer laser. Appl. Phys. B 63, 1–7 (1996). https://doi.org/10.1007/BF01112828

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  • DOI: https://doi.org/10.1007/BF01112828

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