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MICROMAT – International conference on micro materials

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Microsystem Technologies Aims and scope Submit manuscript

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Authors and Affiliations

  1. Fraunhofer IZM, Berlin General Chairman Micromat, , , , ,

    B. Michel

  2. Fraunhofer IZM, Berlin Chairman of the Organizing Committee, , , , ,

    A. Schubert

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  1. B. Michel
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  2. A. Schubert
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Michel, B., Schubert, A. MICROMAT – International conference on micro materials. Microsystem Technologies 5, 1–2 (1998). https://doi.org/10.1007/s005420050132

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  • DOI: https://doi.org/10.1007/s005420050132

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