Abstract
The width of the resolved gap between the features of Auger images was calculated by Rayleigh criterion. When the threshold contrast is provided, this width is almost independent of the examined specimen nature and is defined only by probing electron beam diameter. The relation between the irradiation dose, contrast and spatial resolution is deduced. The flexible dependence allowing to evaluate both the real and maximum attainable spatial resolution of Auger images is obtained.
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Polonsky, B.A., Protopopov, O.D. Spatial resolution limitation in Auger microanalysis of compounds. Mikrochim Acta 114, 413–419 (1994). https://doi.org/10.1007/BF01244568
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DOI: https://doi.org/10.1007/BF01244568