Abstract
WELL defined, focused beams of high energy ions have many applications. A target can be micro-machined by eroding small areas by sputtering1 and the sputtered fragments can be collected for analysis2. In contrast to electron or laser beam machining, there need be no excessive heating of the specimen. If the focused beam is scanned over the surface of the specimen, variations in secondary electron emission can be exploited to simulate a picture similar to that of a scanning electron microscope3, with the difference that some erosion of the specimen occurs during observation.
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HILL, A. Uses of Fine Focused Ion Beams with High Current Density. Nature 218, 202–203 (1968). https://doi.org/10.1038/218202a0
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DOI: https://doi.org/10.1038/218202a0
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