Abstract
The formation of a PZT film of 10–20 μm in thickness via an interfacial polymerization of metal-organic precursors has been studied. A commercially available PZT precursor solution developed for dip- or spin-coating was diluted with hexane containing acetylacetone as chelating agent. The solution was poured on water contained in a teflon reaction container of 88 mm inside diameter. A translucent gel film was formed at the interface of the two immiscible liquids. While floating on water it shrank as the evaporation of solvent proceeded until its diameter decreased to about 45% of its initial value. The dried gel film was almost pore free and its thickness was estimated to be about 10 μm.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
H. Moilanen, J. Lappalainen, and S. Leppavuori, Sensors and Actuators A 43, 357–365 (1994).
G. Teowee, J.M. Boulton, S. Motakef, D.R. Uhlmann, and B.J.J. Zelenski, SPIE 1758, 236–248 (1992).
M. Yamane, S. Shibata, A. Yasumori, T. Yano, and S. Uchihiro, J. Sol-Gel Science and Technology 2, 457–460 (1994).
H. Schulze-Bergkamen, S. Uchihiro, and M. Yamane, in Advanced Materials in Optics Electro-optics and Communication Technologies, edited by P. Vincenzini and G.C. Righini (Techna Srl., 1995), pp. 63–71.
H. Schulze-Bergkamen and M. Yamane, J. Sol-Gel Science and Technology 5, 185–191 (1995).
M. Yamane, J. Sol-Gel Science and Technology 8, 483–487 (1997).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Yamane, M. Preparation of Thick PZT Ceramic Film by an Interfacial Polymerization. Journal of Sol-Gel Science and Technology 13, 821–825 (1998). https://doi.org/10.1023/A:1008642400331
Issue Date:
DOI: https://doi.org/10.1023/A:1008642400331