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Neo-Pentoxide Precursor Synthesis, Solution Preparation, and Electronic Properties of (Ba,Sr)TiO3 Thin Films Derived from a Solution Route

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Abstract

We have recently isolated the neo-pentoxide (HOCH2CMe3, ONp) derivatives of Ba, Sr, and Ti as Ba4(ONp)8(HONp)6(py)2, Sr5(O)(ONp)8(Solv)5 (Solv = solvent), and Ti2(ONp)8, respectively. The combination of these precursors were found to be readily soluble in a wide range of solvents and thus were excellent candidates for preparation of barium strontium titanate ((Ba,Sr)TiO3 or BST) thin films using spin-cast deposition techniques. The highest quality BST films for this system were generated from ternary mixtures dissolved in either pyridine or pyridine/toluene. By in situ VT-GIXRD analysis it was determined that the perovskite phase of BST was readily formed at 650°C. The electronic properties of films crystallized at 700°C indicated that the thin films (300 nm) possessed a dielectric constant of 120 (tan δ = 0.03) with a tunability of 29% at ±10 V. 300 nm films (700°C) which had been generated from a standard BST solution modified with a novel tridentate ligand, had a higher dielectric constant of 180 and a tunability of 35% at ±10 V. The collective characteristics of these precursors offer an attractive alternative to the more complex, less stable sol-gel precursors currently in use.

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Authors and Affiliations

  1. Sandia National Laboratories, Advanced Materials Laboratory, University Boulevard SE, 1001, Albuquerque, NM, 87106, USA

    Timothy J. Boyle

  2. Sandia National Laboratories MS 1405, P.O. Box 5800, Albuquerque, NM, 87185, USA

    Paul G. Clem, Mark A. Rodriguez & Bruce A. Tuttle

  3. Department of Chemistry, New Mexico Institute of Mining and Technology, Socorro, NM, 87801, USA

    Michael D. Heagy

Authors
  1. Timothy J. Boyle
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  2. Paul G. Clem
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  4. Bruce A. Tuttle
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  5. Michael D. Heagy
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Boyle, T.J., Clem, P.G., Rodriguez, M.A. et al. Neo-Pentoxide Precursor Synthesis, Solution Preparation, and Electronic Properties of (Ba,Sr)TiO3 Thin Films Derived from a Solution Route. Journal of Sol-Gel Science and Technology 16, 47–55 (1999). https://doi.org/10.1023/A:1008730801392

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