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Errors in calibrating scanning electron microscope magnification from latex particles

  • Opticophysical Measurements
  • Published:
Measurement Techniques Aims and scope

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Literature cited

  1. V. I. Petrov (ed.), Practical Scanning Electron Microscopy [Russian translation], Mir, Moscow (1978).

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  2. R. M. Ammosov et al., Electronic Engineering, Series 3, Microelectronics [in Russian], No. 5 (101)–6 (102), (1982), p. 129.

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  3. R. M. Ammosov et al., Electronic Engineering, Series 3, Microelectronics [in Russian], No. 2(104) (1983), p. 37.

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  4. R. M. Ammosov et al., Electronic Engineering, Series 3, Microelectronics [in Russian], No. 3(109) (1984), p. 19.

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  5. M. P. Seach and W. A. Dentch, Surface and Interface Analysis,1, No. 1, 2 (1979).

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Authors
  1. R. M. Ammosov
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  2. N. V. Marukov
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  3. A. V. Nikitin
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Additional information

Translated from Izmeritel'naya, Tekhnika, No. 6, p. 27, June, 1988.

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Ammosov, R.M., Marukov, N.V. & Nikitin, A.V. Errors in calibrating scanning electron microscope magnification from latex particles. Meas Tech 31, 560–561 (1988). https://doi.org/10.1007/BF00867530

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  • DOI: https://doi.org/10.1007/BF00867530

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