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High-precision method of measuring linear dimensions in a raster electron microscope

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Abstract

A new method of precision measurement of dimensions in a raster electron microscope based on the concept of “invariant points” is proposed. Testing of the method has shown that it is suitable for measurement of objects with micron, submicron, and nanometric dimensions. The error of the method, evaluated from the results of measurements of special test gages, did not exceed a few nanometers.

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Authors
  1. R. M. Ammosov
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  2. A. I. Kozlitin
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  3. A. V. Nikitin
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 6, pp. 12–14, June, 1994.

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Ammosov, R.M., Kozlitin, A.I. & Nikitin, A.V. High-precision method of measuring linear dimensions in a raster electron microscope. Meas Tech 37, 613–617 (1994). https://doi.org/10.1007/BF00978312

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  • DOI: https://doi.org/10.1007/BF00978312

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