Abstract
The physical principles of a model of the production of a video signal in a scanning electron microscope operating in the fast back-scattered electron collection mode are described in detail. Theoretical relations for calculating the video signal given. The results of a comparison of the model and experimental forms of the video signal show satisfactory agreement which confirms the correctness of the model.
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Translated from Izmeritel'naya Tekhnika, No. 2, pp. 21–24, February, 1995
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Kozlitin, A.I., Nikitin, A.V. Model of the production of a scanning electron microscope image in reflected electrons. Meas Tech 38, 160–167 (1995). https://doi.org/10.1007/BF00979627
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DOI: https://doi.org/10.1007/BF00979627